The growth dynamics of CH3NH3PbI3 perovskite thin films on ITO covered glass substrate were investigated. The evolution of the film could be divided into two stages. A mound-like surface was obvious at the first stage. Stable dynamic scaling was observed for thicker films at the second stage. Through analyzing the scaling exponent, growth exponent β, and 2D fast Fourier transform, it is concluded that, at the second stage, the growth mechanism of mound formation does not play a major role, and the film growth mechanism can be described by Mullins diffusion equation.