The microstructure and the scaling properties of films grown by plasma enhanced chemical vapor deposition are reproduced with a discrete model that takes into account the angular distribution function of the particles and the lateral growth of the films. Both the experimental and simulated surfaces exhibit a granular microstructure and an anomalous scaling behavior characterized by values of the growth exponent that vary with the scale of measurement. Depending on the angular distribution function used in the model, values of ranging from 0.86 to 0.2 are obtained. DOI: 10.1103/PhysRevLett.96.236101 PACS numbers: 68.55.ÿa, 64.60.Ht, 68.47.ÿb, 81.15.Gh Rough surfaces and interfaces are ubiquitous in nature, and from the technological point of view the control of their roughness is becoming critical for applications in fields such as microelectronics, image formation, surface coating, or thin film growth [1]. In this context, during the last years there has been an increasing interest in the description of the self-affine kinetic roughening of surfaces [2 -6]. This regime is characterized by an increase of the roughness with time and/or the scale of observation in a self-affine fashion [7,8]. The conventional dynamic scaling theory, the theoretical background used for the description of these phenomena, is based on the so-called FamilyVicsec relation, which models the evolution of the surface roughness -defined as the rms value of the heights of the different points of the interface-with the deposition time and the scale of measurement by means of the following expression [8]:where is the so-called roughness exponent and the growth exponent. According to the dynamic scaling theory, there exist only a finite number of universality classes characterized by certain values of the ( ; ) exponents, so that all the experimental systems would fall into one of these classes. The dynamic scaling theory can then be understood as an extension of the theoretical framework used for the description of the scaling properties of equilibrium phase transitions to nonequilibrium systems [7].In the last years a number of experimental results have appeared that cannot be interpreted in terms of the conventional dynamic scaling theory. In some works, values of the and/or exponents which do not belong to any of the universality classes have been reported. An example of this behavior is the finding of very high values of the growth exponent (i.e., > 0:5) [2,9]. To account for these values, alternative explanations of that of the universality classes have been proposed. One of the most widely used models is the nondeterministic model of Das SarmaTamborenea [10], that relates the variations of the growth exponent with the control of film growth by surface diffusion. For 2D surfaces, this model accounts for values of this exponent ranging from 0.17 to 0.5, this latter value being only obtained if diffusion is neglected. In the same context, Elsholtz et al. [9] presented a model where they considered a diffusion energy with two contributio...