Scanning Electrochemical Probe Lithography for Ultra‐Precision Machining of Micro‐Optical Elements with Freeform Curved Surface
Hantao Xu,
Lianhuan Han,
Jianan Huang
et al.
Abstract:Two challenges should be overcome for the ultra‐precision machining of micro‐optical element with freeform curved surface: one is the intricate geometry, the other is the hard‐to‐machining optical materials due to their hardness, brittleness or flexibility. Here scanning electrochemical probe lithography (SECPL) is developed, not only to meet the machining need of intricate geometry by 3D direct writing, but also to overcome the above mentioned mechanical properties by an electrochemical material removal mode.… Show more
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