Mammalian and avian cells have been examined in the scanning electron microscope either after prior radio-frequency sputter ion etching with different ions (hydrogen, helium, argon, oxygen) or after argon ion bombardment in the SEM. Whilst the pattern of erosion is similar in the different specimens, the etching pattern varies with the different gases. It has not been possible to relate the etching patterns to characteristic subsurface structures.
I N T R O D U C T I O NThe impact of high-energy ions on the surface of a specimen can cause erosion (or 'sputtering') in which atoms are ejected from the surface as a result of the collision process (see Kaminsky, 1965;Thornton, 1968;Kynaston & Paden, 1970). A variety of factors affect the rate at which material is removed from the surface of a specimen and include the ion mass and energy and its angle of incidence onto the specimen surface and the atomic weights and binding energy of the atoms on the specimen surface. As a result, ionic bombardment may lead to a selective etching of the surface and reveal underlying structural features. Methods of producing incident ions include extraction from a radio-frequency ion source and from a glow discharge in low gas pressures. I n ion-beam etching the high energy beam of ionstis restricted to a small area of the specimen, and is aligned in the ' Stereoscan' system by measuring the beam current passing into a Faraday cage situated in place of the specimen. However, under ionic bombardment nonconducting specimens tend to become positively charged resulting in the deflection of other ions with decreased erosion of the charged areas. This can be reduced by the use of radio-frequency sputter ion etching, whereby the accumulated positive charge is neutralized by bombardment, during alternate half cycles, with electrons produced by rapid reversal of the polarity of the discharge electrodes between which the gaseous plasma is formed.Reports in the literature have indicated that the process of physical ion etching