Scanning force microscopy with micromachined silicon sensors

Nonnenmacher, M.; Greschner, J.; Wolter, Olaf; Kassing, Rainer

doi:10.1116/1.585196

Cited by 111 publications

(42 citation statements)

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“…The technique of SKPFM was first introduced by Nonnemacher et al [11,12] for microelectronic applications, and was applied to corrosion studies in the late 1990s by Frankel et al [17,18]. The AFM mode endows SKPFM the capability to obtain quantitative information of the topography of a sample, which in corrosion studies can be used to monitor the in-situ corrosion rate and coating delamination.…”

Section: Methodsmentioning

confidence: 98%

“…The recent advancements in the technology of scanning Kelvin probe (SPM) based on the technique of atomic force microscopy (AFM), a powerful tool for characterizing surfaces with very high spatial resolution, have led to the invention of scanning Kelvin probe microscopy (SKPFM) that has paved a new road for in-situ exploration of the submicroscopic corrosion phenomena at a resolution that has not been achieved before [11][12][13][14]. SKPFM was successfully used to produce maps of the Volta potential distribution across surfaces of AA2024-T3 in air [15][16][17][18], which provided clear evidence regarding shape, position, compositional inhomogeneities, as well as the local practical nobility of intermetallic compounds at sub-micron resolution.…”

Section: Introductionmentioning

confidence: 99%

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RETRACTED ARTICLE: Investigation of coating delamination on steels by surface topography and Volta potential difference

Pan

Wang

2012

J Solid State Electrochem

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Corrosion-induced delamination of an epoxy coating on the AISI/SAE 1045 carbon steel was studied under a humid atmospheric condition (temperature of 25°C, one standard atmospheric pressure, and relative humidity of 90 %) by the technique of scanning Kelvin probe force microscopy (SKPFM). Surface-polished 1045 samples were first cold coated with the epoxy and then subject to the atmospheric corrosion under the humid atmospheric condition. At specified time intervals, surface Volta potential of the samples was measured using the SKPFM over the dry surface of epoxy coating. The map of Volta potentials demonstrated high contrasts among three characteristic zones: intact steel-epoxy interface, delaminated interface, and interface with active corrosion, which based on a rigorous calibration procedure were then linked to the actual corrosion potential of the steel (measured using a potentiostat w.r.t. a saturated calomel electrode). The SKPFM was found to be able to provide a mean of direct and nondestructive detection of early active corrosion and coating delamination of steels at a submicroscopic resolution, which outperformed the conventional electrochemical techniques for such purposes.

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Section: Methodsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

RETRACTED ARTICLE: Investigation of coating delamination on steels by surface topography and Volta potential difference

Pan

Wang

2012

J Solid State Electrochem

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“…One of the first long-range interactions is hydrodynamic inducing a non-negligible damping of the cantilever vibration amplitude during the approach of the cantilever towards the sample in air [14]. Figure 2 shows the effect of damping of the cantilever driven at the first flexural mode.…”

Section: Resultsmentioning

confidence: 98%

Enhanced sensitivity to force gradients by using higher flexural modes of the atomic force microscope cantilever

Hoummady

Farnault

1998

Applied Physics A: Materials Science & Processing

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Higher flexural modes of a Si cantilever are used in order to increase the operating frequencies in non-contact mode scanning force microscopy. By recording frequency responses at different tip-sample distances and by using different flexural modes, long-range tip-sample interactions are studied. The experimental results reveal that operating at higher resonant modes makes it possible to improve sensitivity to force gradients and to avoid overlap between hydrodynamic interactions and attractive interactions in the range of 100-nm tip-sample distances. Using the second-harmonic, a sevenfold-enhanced sensitivity is demonstrated. Finally, discussion on the appropriate technique related to force gradient measurement, i.e. slope detection or frequency modulation technique, is reported.During the last decade, atomic force microscopy (AFM) [1] has atttacted a great interest in a wide field of applications including biological living cells [2]. For this kind of application, dynamic mode is the most used operating mode and avoids damage to such samples. There are numerous advantages in developing an AFM operating at high frequencies.Mainly, it allows fast scanning and reduces the thermal noise, and therefore the ultimate sensitivity to force gradients. Imaging systems with true atomic resolution as well as high-speed data storage are the main driving forces in this field. In order to obtain very high operating frequencies, fabrication of nanometric-scale cantilevers of small mass has been already reported [3,4]. Due to the small size of the cantilever (typically sub-micron size), it requires more complicated detection systems. However, another alternative is to use conventional micromachined AFM cantilevers vibrating at higher flexural modes. Several groups are investigating this possibility. Rabe et al.[5] published a detailed analysis of cantilever vibration mechanisms, detecting more than 10 modes using silicon cantilevers. Recently, tapping mode images were performed by * Permanent address:Minne et al.[6] using higher flexural modes. The piezoresistive cantilever that was used was driven at 132 kHz, which corresponded to the second flexural mode of the clamped-free beam.A quantitative analysis of sensitivity enhancement using higher modes has not yet been achieved. In this paper, we will demonstrate the ability of higher modes to enhance sensitivity to force gradients. For our experiments, we used a home-made force microscope with an original detection technique based on a two degrees of freedom optical detection system: interferometry and optical beam deflection [7], and a silicon cantilever driven at higher modes from the first to the fourth flexural mode (up to 6 MHz). By recording the quasi-instantaneous frequency response at different tipsample distances, the two main long-range interactions were distinguished, i.e. air damping and attractive forces. The results reveal that higher order flexural modes allow us to avoid overlap between these two interactions.For measurement of force gradients, two techniques have ...

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“…For indentation and imaging we used a diamond-coated silicon single crystalline cantilever (Type: CDT-NCLR, manufactured by NanoSensors). The bending stiffness of the cantilever was calculated according to the beam geometry method [16] and was found to be k n = 46 N/m. The sensitivity of the photo-diode was calibrated in the non-contact mode of AFM, following the method proposed in [17] and considering a conversion factor of for the vibration energy of the cantilever determined from the optically measured deflection [18].…”

Section: Methodsmentioning

confidence: 99%

Lower nanometer-scale size limit for the deformation of a metallic glass by shear transformations revealed by quantitative AFM indentation

Caron¹,

Bennewitz²

2016

Nano Online

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We combine non-contact atomic force microscopy (AFM) imaging and AFM indentation in ultra-high vacuum to quantitatively and reproducibly determine the hardness and deformation mechanisms of Pt(111) and a Pt 57.5 Cu 14.7 Ni 5.3 P 22.5 metallic glass with unprecedented spatial resolution. Our results on plastic deformation mechanisms of crystalline Pt(111) are consistent with the discrete mechanisms established for larger scales: Plasticity is mediated by dislocation gliding and no rate dependence is observed. For the metallic glass we have discovered that plastic deformation at the nanometer scale is not discrete but continuous and localized around the indenter, and does not exhibit rate dependence. This contrasts with the observation of serrated, rate-dependent flow of metallic glasses at larger scales. Our results reveal a lower size limit for metallic glasses below which shear transformation mechanisms are not activated by indentation. In the case of metallic glass, we conclude that the energy stored in the stressed volume during nanometer-scale indentation is insufficient to account for the interfacial energy of a shear band in the glassy matrix.1721

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Scanning force microscopy with micromachined silicon sensors

Cited by 111 publications

References 0 publications

RETRACTED ARTICLE: Investigation of coating delamination on steels by surface topography and Volta potential difference

RETRACTED ARTICLE: Investigation of coating delamination on steels by surface topography and Volta potential difference

Enhanced sensitivity to force gradients by using higher flexural modes of the atomic force microscope cantilever

Lower nanometer-scale size limit for the deformation of a metallic glass by shear transformations revealed by quantitative AFM indentation

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