1998
DOI: 10.1063/1.120638
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Scanning Joule expansion microscopy at nanometer scales

Abstract: We report a new technique called scanning Joule expansion microscopy that can simultaneously image surface topography and material expansion due to Joule heating with vertical resolution in the 1 pm range and lateral resolution similar to that of an atomic force microscope. By coating the sample with a polymer film, we demonstrate that sample temperature distribution can be directly measured without the need of fabricating temperature-sensing scanning probes.

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Cited by 121 publications
(87 citation statements)
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“…As devices shrink to smaller dimensions, selecting materials for electrical components and arranging them into integrated circuitry become important challenges. In microscopic interconnect components, electron scattering at the interfaces and grain boundaries play a dominant role in charge carrier transport 5 and heat generation 6 . However, the heat dissipation, cross-effects of Joule heating and electromigration that occur on the nanoscale have not been actively elucidated 7 .…”
Section: Introductionmentioning
confidence: 99%
“…As devices shrink to smaller dimensions, selecting materials for electrical components and arranging them into integrated circuitry become important challenges. In microscopic interconnect components, electron scattering at the interfaces and grain boundaries play a dominant role in charge carrier transport 5 and heat generation 6 . However, the heat dissipation, cross-effects of Joule heating and electromigration that occur on the nanoscale have not been actively elucidated 7 .…”
Section: Introductionmentioning
confidence: 99%
“…Due to the advance of experimental techniques the measurement of thermodynamic quantities like temperature with a spatial resolution on the nanometer scale seems within reach [7,8,9,6]. These techniques have already been applied for a new type of scanning microscopy, using a temperature sensor [10,11], that shows resolutions below 100nm. An important question thus arises [6]: Down to what spatial scale does a meaningful notion of temperature exist at all?…”
mentioning
confidence: 99%
“…All numerical tests we made showed such a behavior. Let us now assume the whole system to be in a thermal state with a reciprocal temperature β and a density matrix according to equation (11). We calculate the distance between this density matrix and a product of canonical density matrices of the subgroups corresponding to a partitionρ…”
mentioning
confidence: 99%
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“…3,4 Although useful images sensitive to thermal diffusivity have been obtained, such experiments are difficult to interpret because the depth resolution is often strongly influenced by near-field thermal effects governed by the probe size and tip-sample thermal resistance rather than by the modulation frequency. 2 A different approach that avoids this complication is based on the local probing of thermal expansion: subsurface periodic resistive heating 5,6 or chopped optical radiation 7-9 generate surface vibrations that can then be mapped to a lateral resolution of a few nanometers in standard atomic force microscope ͑AFM͒ or scanning tunneling microscope configurations.…”
mentioning
confidence: 99%