Scanning microdeformation microscopy in reflection mode

Vairac, Pascal; Cretin, B.

doi:10.1063/1.116413

Cited by 53 publications

(24 citation statements)

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“…Similarly, due to diffraction of the near-field acoustic waves, deeply buried nanostructures are expected to appear more enlarged with respect to their real dimension than nanostructures near the surface. A-SPM techniques have indisputably demonstrated their capability for imaging subsurface features using ad hoc prepared samples [69,[111][112][113][114]. In particular, A-SPM quantitative measurements of contact stiffness have shown good agreement with theoretical calculations of reduced adhesion at buried interfaces [111,115] and of subsurface voids [112].…”

Section: Subsurface Imagingmentioning

confidence: 85%

Acoustic Scanning Probe Microscopy: An Overview

Passeri

Marinello

2012

Acoustic Scanning Probe Microscopy

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In this chapter, which serves as an introduction to the entire book, an overview is given of techniques resulting from the synergy between ultrasonic methods and scanning probe microscopy (SPM). Although other acoustic SPMs have been developed, those reviewed in this book are either the earliest proposed techniques, which are most widespread, extensively used, and continuously improved, or have been recently developed, but have been proved to be extremely promising. The techniques are briefly introduced, emphasizing what they have in common, their differences, their capabilities, and limitations.

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Section: Subsurface Imagingmentioning

confidence: 85%

Acoustic Scanning Probe Microscopy: An Overview

Passeri

Marinello

2012

Acoustic Scanning Probe Microscopy

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“…Our SMM has been described in previous publications [2,8], where the two operating modes, transmission and reflection, were presented. The cantilever probe of the system has since been improved, and Fig.…”

Section: Methodsmentioning

confidence: 98%

“…Recent studies on the subject show that dynamic ultrasonic methods, such as force modulation microscopy or atomic force acoustic microscopy [1][2][3][4][5][6][7][8][9], are powerful tools for investigating the adhesive energy or sample stiffness with high resolution. These a.c. methods, in which the probe tip periodically interacts with the sample, reveal changes in the contrast when different materials are present at the sample surface or when subsurface defects are detectable.…”

Section: Introductionmentioning

confidence: 99%

Frequency shift of a resonating cantilever in a.c. force microscopy: towards a realistic model

Vairac¹,

Cretin²

1998

Applied Physics A: Materials Science & Processing

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We have developed scanning microdeformation microscopy (SMM) in reflection mode, which is a form of contact a.c. force microscopy using a tip size of the order of a micron. The tip is mounted at the end of the cantilever and vibrates in contact with the sample. The system uses a resonance frequency and enables quantitative material characterization at any point of the sample surface.Quantifying the local elastic properties of the material requires realistic modeling of the behavior of the system. In this paper, we present a model in which the cantilever is considered as a continuous medium. The model uses the hertzian contact theory to describe the mechanical contact between the sample and the tip, represented by a spring. Moreover, this model takes into account the experimental aspect of the clamped cantilever base. The associated boundary conditions are physically justified.Experimental measurements have been performed. They show the evolution of the resonance frequency when contacting different samples. The corresponding fitted theoretical curves give reasonable agreement with experiment and allow measurement of the local elastic properties of the sample with good accuracy (better than 5%).In scanning probe microscopy, the deformation behavior of a very small volume of material at a surface is of great importance in determining the adhesive and tribological properties of materials. Recent studies on the subject show that dynamic ultrasonic methods, such as force modulation microscopy or atomic force acoustic microscopy [1-9], are powerful tools for investigating the adhesive energy or sample stiffness with high resolution. These a.c. methods, in which the probe tip periodically interacts with the sample, reveal changes in the contrast when different materials are present at the sample surface or when subsurface defects are detectable. In our setup, scanning microdeformation microscopy (SMM), we use a form of contact a.c. force microscopy with a tip size of the order of a micron. The tip, mounted at the end of a cantilever (as in atomic microscopy), vibrates in contact with the sample in the kilohertz range. In this paper, we describe a realistic model of the complete probe by using a continuum mechanics model, where the forces acting on the tip are introduced as boundary conditions. Because a quantitative calculation of the resonance frequencies is essential when quantitative information about the local elasticity of the sample is to be extracted, we have compared the experimental and theoretical results and improved the model in order to obtain good accuracy for the local properties of the samples investigated. Experimental setupOur SMM has been described in previous publications [2,8], where the two operating modes, transmission and reflection, were presented. The cantilever probe of the system has since been improved, and Fig. 1a shows the latest version of the SMM operating in reflection mode.The probe head, which is the sensitive element of the system (Fig. 1b), consists of a piezoelectric bimorph transdu...

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“…They depend either on the deflection measurement in linear [3,4] and nonlinear [5,6] regimes or on the resonance frequency measurement [8][9][10][11][12]. It has been shown in the latter approach that a soft cantilever can induce elastic deformation on relatively stiff materials when it is vibrated at higher order modes [9][10][11][12] because of the acceleration effect.…”

Section: Introductionmentioning

confidence: 99%

Quantitative elasticity evaluation by contact resonance in an atomic force microscope

Yamanaka¹,

Nakano²

1998

Applied Physics A: Materials Science & Processing

133

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We present a local elasticity measurement from the resonance frequency of a cantilever vibrated at its base. A sharp tip on top of the cantilever is in contact with the sample surface at a servo-controlled constant static force. The advantage of a continuum model for the cantilever vibration over the localized-spring model in the elasticity measurement is proved quantitatively. As an application, Young's modulus of soda lime glass was measured and a smooth radial gradient of Young's modulus of about 29% was observed for the first time on a cross section of a carbon fiber of diameter 7 µm. Further improvement of the independent shear stiffness measurement was proposed by a theoretical analysis of torsional vibration with a boundary condition for the elastically supported tip.Recently, local elasticity measurement methods using a vibrating cantilever of an atomic force microscope (AFM) [1] based on the contact mechanics [2] have been developed. They depend either on the deflection measurement in linear [3, 4] and nonlinear [5, 6] regimes or on the resonance frequency measurement [8][9][10][11][12]. It has been shown in the latter approach that a soft cantilever can induce elastic deformation on relatively stiff materials when it is vibrated at higher order modes [9-12] because of the acceleration effect. However, quantitative measurement is still difficult for the following reasons. Although a very soft cantilever can be used to evaluate stiff materials, in some approaches the tip on such a cantilever is easily trapped by the surface moisture film and then the reproducibility of the measurement is usually poor. On the other hand, a very stiff cantilever (> 100 N/m) can be used to measure the local elasticity of stiff materials in the force-modulation mode [3] and the force-curve method [13], but the large deformation of the sample causes problems [13]. Finally, it is always necessary to assume Poisson's ratio in * order to obtain Young's modulus. In this paper we present an approach to solve these problems. The principle of Young's modulus measurements by using resonance of the deflection vibrationThe deflection vibration of the cantilever shown in Fig. 1 is employed for the measurement of Young's modulus. First, we briefly summarize the theory of cantilever vibration [10,12]. The equation of motion for deflection vibration iswhere E is Young's modulus, ρ is the density and t the thickness of the cantilever. The boundary condition at x = 0 is z(0) = 0 and dz/dx = 0 whereas that at x = L (L is the length of cantilever) iswhere w is the width of cantilever and s is the contact stiffness, or force gradient in the contact mode. The left-hand side of (2) is the shear force of the cantilever and the righthand side is the restoring force from the sample. Solving (1) with (2) we have obtained the frequency equation [10]where α = (48π 2 ρL 4 /Et 2 ) 1/4 f 1/2 (frequency constant) and k = Ewt 3 /4L 3 (cantilever stiffness). The frequency constant α of the lowest three modes are plotted in Fig. 2a as a function of the ratio o...

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Scanning microdeformation microscopy in reflection mode

Abstract: Articles you may be interested inReflection-mode, confocal, tip-enhanced Raman spectroscopy system for scanning chemical microscopy of surfaces Rev. Sci. Instrum. 83, 093706 (2012);

Cited by 53 publications

References 9 publications

Acoustic Scanning Probe Microscopy: An Overview

Acoustic Scanning Probe Microscopy: An Overview

Frequency shift of a resonating cantilever in a.c. force microscopy: towards a realistic model

Quantitative elasticity evaluation by contact resonance in an atomic force microscope

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