Scanning Probe Lithography

Ryu, Yu Kyoung; Rodrigo, Javier Martínez

doi:10.1201/9781003223610

Cited by 2 publications

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“…An example of the precision offered by scanning probes was demonstrated by using a STM to arrange individual atoms on a surface and measure electronic states with an astonishing level of control [7]. The capabilities and applications of SPL have evolved over the past few decades, providing a toolbox of instruments for patterning materials on small length scales [8,9].…”

Section: Introductionmentioning

confidence: 99%

Generating smooth potential landscapes with thermal scanning-probe lithography

Lassaline

2023

J. Phys. Mater.

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Scanning probe microscopy (SPM) uses a sharp tip to interrogate surfaces with atomic precision. Inputs such as mechanical, electrical, or thermal energy can activate highly localized interactions, providing a powerful class of instruments for manipulating materials on small length scales. Thermal scanning-probe lithography (tSPL) is an advanced SPM variant that uses a silicon tip on a heated cantilever to locally sublimate polymer resist, acting as a high-resolution lithography tool and a scanning probe microscope simultaneously. The main advantage of tSPL is the ability to electrically control the temperature and applied force of the tip, which can produce smooth topographical surfaces that are unattainable with conventional nanofabrication techniques. Recent investigations have exploited these surfaces to generate potential landscapes for enhanced control of photons, electrons, excitons, and nanoparticles, demonstrating a broad range of experimental possibilities. This paper outlines the principles, procedures, and limitations of tSPL for generating smooth potentials and discusses the prospective impact in photonics, electronics, and nanomaterials science.

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Section: Introductionmentioning

confidence: 99%

Generating smooth potential landscapes with thermal scanning-probe lithography

Lassaline

2023

J. Phys. Mater.

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“…Here, we report experimental results that bear evidence for a series of unusual aspects of electrical conduction associated with lateral charge transport on the −COOH surfaces of OTSox regions patterned by IEBL. Monolayer regions with top −COOH functionality previously realized by local electro-oxidation of the top −CH 3 groups of OTS/Si monolayers with conductive atomic force microscopy (AFM) probes 14−16 (a form of oxidation scanning probe lithography, o-SPL 17,18 ) or stamps 19,20 as patterning tools were found to exhibit single-layer electrical conduction associated with fast lateral transport and exchange of protons and metal ions along the patterned −COOH surface paths. 21 With the advancement of IEBL, 1 it became immediately evident that the electron-beam mode of monolayer chemical patterning along with some additional experimental improvements allow fabrication of conductive OTSox features that outperform by far those previously produced by electro-oxidation (OTSeo) with conductive AFM probes.…”

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confidence: 99%

Interfacial Electron Beam Lithography Converts an Insulating Organic Monolayer to a Patterned Single-Layer Conductor with Puzzling Charge Transport Performance

Maoz,

Nelson,

Gogoi

et al. 2024

ACS Nano

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The direct generation of conducting paths within an insulating surface represents a conceptually unexplored approach to single-layer electrical conduction that opens vistas for exciting research and applications fundamentally different from those based on specific layered materials. Herein we report surface channels with single-layer −COOH functionality patterned on insulating n-octadecyltrichlorosilane monolayers on silicon that exhibit unusual ionic-electronic conduction when equipped with ion-releasing silver electrodes. The strong dependence of charge transport in such channels on their lateral dimensions (nanosize, macro-size), the type (p, n) and resistivity (doping level) of the underlying silicon substrate, the nature of the insulating spacer layer between the conducting channel and the silicon surface, and the postpatterning chemical manipulation of channel's −COOH functionality allows designing channels with variable resistivities, ranging from that of a practical insulator to some unexpectedly low values. The unusually low resistivities displayed by channels with nanometric widths and micrometer-millimeter lengths are attributed primarily to enhanced electronic transport within ultrathin nanowirelike silver metal films formed along their conductive paths. Function−structure correlations derived from a comprehensive analysis of electrical, atomic force microscopy, and Fourier transform infrared spectral data suggest an unconventional mode of conduction in these channels, which has yet to be elucidated, apparently involving coupled ionic-electronic transport mediated and enhanced by interfacial electrical interactions with charge carriers located outside the conducting channel and separated from those carrying the measured current. These intriguing findings hint at effects akin to Coulomb pairing in the proposed mechanisms of excitonic superconductivity in interfacial nanosystems structurally related to the present metalized surface channels. continued...

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Scanning Probe Lithography

Cited by 2 publications

References 0 publications

Generating smooth potential landscapes with thermal scanning-probe lithography

Generating smooth potential landscapes with thermal scanning-probe lithography

Interfacial Electron Beam Lithography Converts an Insulating Organic Monolayer to a Patterned Single-Layer Conductor with Puzzling Charge Transport Performance

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