2002
DOI: 10.1143/jjap.41.4973
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Scanning Probe Microscope Lithography of Silicon Using a Combination of a Carbon Nanotube Tip and a Polysilane Film as a Mask

Abstract: The effect of nanomaterials on biological reactions has received much attention. We report herein that silicon nanowires (SiNWs) inhibit the polymerase chain reaction (PCR). The inhibitory effect was found to be concentration-dependent, with a minimum inhibitory concentration of about 0.4 mg ml −1 . DNA polymerase, restriction endonucleases, lysozyme and horseradish peroxidase maintained their bioactivities after exposure to SiNWs. Also the interaction of SiNWs with primers and dNTP did not lead to decreased P… Show more

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Cited by 12 publications
(2 citation statements)
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“…For the most part of these SPL experiments that are conveniently done in ambient atmosphere, ambient relative humidity of main factors in affecting experimental results involving tip shape, tunneling Advances in Materials Manufacturing Science and Technology 354 current or emission current, tip-sample bias, scanning speed, and relative humidity, is proved to be a crucial one that not only points to a electrochemical mechanism in nature [8] but also affects drastically an aspect ratio of written patterns, i.e. a lithographic resolution [9].…”
Section: Mechanisms Of These Spl Methodsmentioning
confidence: 99%
“…For the most part of these SPL experiments that are conveniently done in ambient atmosphere, ambient relative humidity of main factors in affecting experimental results involving tip shape, tunneling Advances in Materials Manufacturing Science and Technology 354 current or emission current, tip-sample bias, scanning speed, and relative humidity, is proved to be a crucial one that not only points to a electrochemical mechanism in nature [8] but also affects drastically an aspect ratio of written patterns, i.e. a lithographic resolution [9].…”
Section: Mechanisms Of These Spl Methodsmentioning
confidence: 99%
“…This fact limits further application of the electro-ceramic devices. By contrast, in a field of Si-based devices, machining and modifying techniques around several ten-nanometre scales are generally and practically used to realize highly densified packages [6,7]. In addition, the scale of fabrication is approaching the few nanometre scale.…”
Section: Introductionmentioning
confidence: 99%