Scanning process of spark assisted chemical engraving (SACE) on ZrO2 ceramics by constraining discharges to tool electrode end

Ji, Bolin; Tong, Hao; Li, Junjie; Li, Yong; Xu, Meng‐Yao

doi:10.1016/j.ceramint.2019.09.107

Cited by 14 publications

(6 citation statements)

References 12 publications

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“…The hurdle and perforated sheet can prevent the turbulence and vortex of the flowing electrolyte. A proper immersion depth can be obtained through the baffle and the liquidometer [15]. The distance between the auxiliary electrode and the tool electrode can be conveniently adjusted by adding plates of different thickness beneath the auxiliary electrode.…”

Section: Fig1 Photo Of Experimental Systemmentioning

confidence: 99%

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Nawaz¹,

Cao²,

Tong

et al. 2023

Preprint

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While machining the quartz glass in micro ECDM (electrochemical discharge machining) scanning process, the wear of tool electrode is adverse to machining accuracy. In this research, the developed spindle with servo feedback control of flexible force is used to avoid the instantaneous change of contact force that leads to the bending of tool electrode when the machining surface is uneven. The basic experiments are carried out through optimizing the processing parameters of open-circuit voltage, scanning speed, and scanning time, and then the mechanism and key influential factors of tool wear are analyzed. It is found that the tool wear is caused by the chemical reaction, the heat from discharges, and the friction between tool-electrode tip and workpiece surface. Therefore, three methods for reducing the tool wear are proposed and experimented. Method I: the low temperature electrolyte is applied in increasing the heat dissipation ratio of the tool-tip. Method II: the side wall of tool electrode is insulated by an oil film to constrain spark discharges only at the tool-tip bottom. Method III: more bubbles are pumped to promote the formation of gas film and the electrolyte renewal. Experimental results show the tool wear can be obviously reduced, so the machining accuracy of micro structures on quartz glass is improved in micro ECDM scanning process.

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Section: Fig1 Photo Of Experimental Systemmentioning

confidence: 99%

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Nawaz¹,

Cao²,

Tong

et al. 2023

Preprint

Self Cite

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“…The experimental parameters are shown in table 1. Before the experiments, the following preparatory steps were performed [25]: the surface of the ZrO 2 workpiece was leveled, the end of the tool electrode was flattened, the immersion depth of the tool electrode was adjusted, and the initial machining gap was set.…”

Section: Experimental Systemsmentioning

confidence: 99%

Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO₂ ceramics

Tong

Han

et al. 2020

J. Micromech. Microeng.

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ZrO2 ceramic has a wide range of applications, such as in the thermal barrier coating (TBC) of turbine blades, micro actuators, and gas sensors. However, this material is challenging to machine due to its high hardness and brittleness. Although spark assisted chemical engraving (SACE) can be used to machine ZrO2 ceramics, the traditional SACE models for glass are difficult to apply to ZrO2 ceramics since the melting point of ZrO2 is much higher than that of glass. A theoretical basis for applying the SACE process to ZrO2 ceramics is still lacking, which makes applying the SACE process to machine micro cavities with high surface quality in ZrO2 ceramics very challenging. This paper proposes an energy action model based on the processing voltage, pulse width and machining gap by analyzing the energy transfer process of SACE. The energy model expresses difference in the spark energy between physical removal and chemical removal. Through machining experiments, the contact effect of the SACE process on ZrO2 ceramics was found, and the reasons why the SACE process is sensitive to the machining gap were clarified. Furthermore, physical and chemical removal process models with or without the discharge constraint onto the end of the tool electrode were established. Using the above theoretical models, a circular ring microcavity without micro cracks on the surface was achieved in a ZrO2 ceramic workpiece by using the SACE process with the regulating energy effect trending to the chemical removal. Additionally, considering the contact effect and the process models applied in the SACE scanning process of ZrO2 ceramics, a tool electrode with a spring structure was employed to solve the bending problem of the micro tool electrode. As a result, a square micro-cavity with high surface quality was machined successfully.

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“…Ji et al [98] conducted SACE experiments on zirconium dioxide ceramic while using a 500 µm notched cylindrical copper tool-electrode. The proposed tool has an augmented number of sharp square edges for the sake of constraining the discharges to its end as shown in Figure 24.…”

Section: Ceramicsmentioning

confidence: 99%

“…In general, a higher MRR with an 87 µm deep micro-groove was achieved using the notched tool-electrode over the traditional tool electrode with a flattened end. Reprinted from the work in [98] with permission from Elsevier.…”

Section: Ceramicsmentioning

confidence: 99%

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The Capabilities of Spark-Assisted Chemical Engraving: A Review

Bassyouni

Ziki

2020

JMMP

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Brittle non-conductive materials, like glass and ceramics, are becoming ever more significant with the rising demand for fabricating micro-devices with special micro-features. Spark-Assisted Chemical Engraving (SACE), a novel micromachining technology, has offered good machining capabilities for glass and ceramic materials in basic machining operations like drilling, milling, cutting, die sinking, and others. This paper presents a review about SACE technology. It highlights the process fundamentals of operation and the key machining parameters that control it which are mainly related to the electrolyte, tool-electrode, and machining voltage. It provides information about the gas film that forms around the tool during the process and the parameters that enhance its stability, which play a key role in enhancing the machining outcome. This work also presents the capabilities and limitations of SACE through comparing it with other existing micro-drilling and micromachining technologies. Information was collected regarding micro-channel machining capabilities for SACE and other techniques that fall under four major glass micromachining categories—mainly thermal, chemical, mechanical, and hybrid. Based on this, a figure that presents the capabilities of such technologies from the perspective of the machining speed (lateral) and resulting micro-channel geometry (aspect ratio) was plotted. For both drilling and micro-channel machining, SACE showed to be a promising technique compared to others as it requires relatively cheap set-up, results in high aspect ratio structures (above 10), and takes a relatively short machining time. This technique shows its suitability for rapid prototyping of glass micro-parts and devices. The paper also addresses the topic of surface functionalization, specifically the surface texturing done during SACE and other glass micromachining technologies. Through tuning machining parameters, like the electrolyte viscosity, tool–substrate gap, tool travel speed, and machining voltage, SACE shows a promising and unique potential in controlling the surface properties and surface texture while machining.

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Scanning process of spark assisted chemical engraving (SACE) on ZrO2 ceramics by constraining discharges to tool electrode end

Cited by 14 publications

References 12 publications

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO₂ ceramics

The Capabilities of Spark-Assisted Chemical Engraving: A Review

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Scanning process of spark assisted chemical engraving (SACE) on ZrO2 ceramics by constraining discharges to tool electrode end

Cited by 14 publications

References 12 publications

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics

The Capabilities of Spark-Assisted Chemical Engraving: A Review

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Product

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Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO₂ ceramics