2008
DOI: 10.1116/1.2990789
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Scanning proximal probes for parallel imaging and lithography

Abstract: Articles you may be interested inSelf-sensing cantilevers with integrated conductive coaxial tips for high-resolution electrical scanning probe metrology All-diamond cantilever probes for scanning probe microscopy applications realized by a proximity lithography process Rev. Sci. Instrum. 77, 043708 (2006); Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated … Show more

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Cited by 45 publications
(29 citation statements)
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“…• SThM, which adds the capability of imaging thermal properties of the sample This list cannot be considered complete: there are a large variety of specialized scanning-based AFM modes, including those involving more than one cantilever being used at once (Sulzbach & Rangelow, 2010;Ivanova et al, 2008). It should also be mentioned here that many AFM-related techniques do not require scanning.…”
Section: Advanced Spm Techniquesmentioning
confidence: 98%
“…• SThM, which adds the capability of imaging thermal properties of the sample This list cannot be considered complete: there are a large variety of specialized scanning-based AFM modes, including those involving more than one cantilever being used at once (Sulzbach & Rangelow, 2010;Ivanova et al, 2008). It should also be mentioned here that many AFM-related techniques do not require scanning.…”
Section: Advanced Spm Techniquesmentioning
confidence: 98%
“…For instance, a possible array control scheme for SPM based on the work of Ivanova et al [9] could work in the following way: Each beam is excited at a fixed frequencyˆ with a constant amplitude i ac (which is set in close proximity to a surface). A change in distance to the sample surface D leads to a change in oscillation amplitude, which is measured by the integrated sensor and compensated by a static displacement of the beam induced by changing i dc to restore the initial distance D 0 .…”
Section: A Modal Analysismentioning
confidence: 99%
“…The reference temperature difference θ 0 = T R − T 0 is based on a reference temperature T R of 303.15 K. For the spatial discretization, the following mixed Ritz approach is applied to (9) and (12) w…”
Section: Coupled Systemmentioning
confidence: 99%
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