Scanning strategy for surface defects evaluation of large fine optical components

Wang, Shiling; Sun, Huanyu; Hu, Xiaobo Sharon; Zou, Shuai; Guo, Shiwei; Wang, Hongxia; Sun, Feng; Cheng, Xinglei; Zhang, Junan; Liu, Dong

doi:10.1016/j.optlastec.2022.108473

Cited by 4 publications

(1 citation statement)

References 23 publications

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“…In the formula, subsize is the corresponding side length of a single sub-aperture, and the sub-aperture spacing used in this formula is to meet the minimum value of full coverage of the spherical surface. Considering the error of the actual scanning motion and the overlapping part of the image stitching as the stitching basis, a certain overlap ratio is required [10] . On the basis of this formula, the subsize can be changed by ratio according to the actual FOV, that is:…”

Section: Serpentine-like Graft Scanning Strategymentioning

confidence: 99%

Research on defect detection of large-aperture multi-faceted optical components

guo,

Lv,

et al. 2023

AOPC 2023: Optic Fiber Gyro

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In inertial confinement fusion (ICF) systems, damage induced by high power lasers is one of the key factors for limiting the further improvement of energy density. Also, there is a close relationship between various defects and damage characteristics of optical components. Usually, the optical components detected in the system have a large-aperture and a variety of surface types. The defects have the characteristics of small scale, low distribution density and wide distribution range, etc. It is a great challenge to achieve multi-faceted detection with high precision and efficiency. In this paper, according to the requirements for micro defects detection on the surface of large-aperture optical components, a multimodal scanning detection method combining the bright-field and dark-field imaging (BDFI) is given. Based on the high sensitivity of dark-field microscopic imaging (DFMI), the ring illumination strategy of collimate light source is studied to locate defects globally. The coaxial illumination method is used to accurately detect the characteristic parameters of defects, which is able to realize the size quantification of multi-morphological defects. At the same time, in order to cope with the detection needs of large-aperture and multi-faceted optical components, the sub-aperture scanning method based on the distribution structure of geodesic sphere is proposed. The multi-aperture scanning path is automatically planned and the spatial distribution of defects is reconstructed with three-dimensional mapping. On this basis, by cooperating with the automatic motion device, automatic focus and high-speed automatic scanning of detection can be realized. The methods proposed in this paper can be accomplished for efficient detection of large-aperture optics with a resolution of 0.5μm for surface defects, which meets the needs of multi-faceted detection. Therefore, it is of great significance to guide the precision machining of optical components and support the process optimization, which has great importance for the final research results of the ICF system.

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Section: Serpentine-like Graft Scanning Strategymentioning

confidence: 99%

Research on defect detection of large-aperture multi-faceted optical components

guo,

Lv,

et al. 2023

AOPC 2023: Optic Fiber Gyro

Self Cite

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Impact of mirror local defects on system scattering in telescopes

Liu,

Wang,

Leng

et al. 2024

Results in Physics

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Dark-field surface defects detection method for multi-surface-shape large aperture optical components

Guo,

Wang,

Wang

et al. 2024

Appl. Opt.

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In large-scale high-power optical systems such as inertial confinement fusion systems, the design of various optical components is often larger and more complex. Therefore, determining how to ensure the quality evaluation of optical components faces new challenges. As a key evaluation step for component quality, surface defects detection needs to consider improving the detection capability for various complex surface shapes and large aperture components. Meanwhile, the accuracy level of detection does not decrease with an increase in detection aperture size. The defects that need to be detected are typically small in size and randomly distributed throughout the aperture. Comprehensive aperture-wide information is required to ensure the thorough detection of defects in the components. Therefore, it is required that the detection system maintains compatibility with multi-surface shapes while balancing detection efficiency and accuracy. Against this background, the surface defects detection technology with high compatibility is explored in this paper. The illumination system of the dark-field imaging system and a generalized scanning path search strategy is proposed. Under the condition of ensuring a detection sensitivity of 0.5 µm, surface defects detection for various types of optical components with apertures several hundred times larger than the detection field of view is achieved.

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Scanning strategy for surface defects evaluation of large fine optical components

Cited by 4 publications

References 23 publications

Research on defect detection of large-aperture multi-faceted optical components

Research on defect detection of large-aperture multi-faceted optical components

Impact of mirror local defects on system scattering in telescopes

Dark-field surface defects detection method for multi-surface-shape large aperture optical components

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