2023
DOI: 10.1093/micmic/ozac049
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Scanning Transmission Ion Microscopy Time-of-Flight Spectroscopy Using 20 keV Helium Ions

Abstract: Scanning transmission ion microscopy imaging was performed whilst using a delay-line detector to record the impact position and arrival time of transmitted ions or neutrals. The incident helium ion beam had an energy of 20 keV and the arrival time measurements were used to calculate the energy loss after transmission through the sample. The 5D dataset thus produced (2D position in the sample plane, 2D position in the detector plane, and energy) is analyzed by collection into energy spectra or images. It is dem… Show more

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Cited by 3 publications
(1 citation statement)
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“…Charge exchange and electronic excitations in the interaction of slow ions with solids are currently the subject of an intense investigation [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. These processes are important in charge fraction formation, in energy deposition in solids and in several applications such as microscopy and characterization of materials.…”
Section: Introductionmentioning
confidence: 99%
“…Charge exchange and electronic excitations in the interaction of slow ions with solids are currently the subject of an intense investigation [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. These processes are important in charge fraction formation, in energy deposition in solids and in several applications such as microscopy and characterization of materials.…”
Section: Introductionmentioning
confidence: 99%