“…On the other hand, with scanning microscopes, e.g. scanning photoelectron microscopes (SPEM) (Gü nther et al, 2002;Abyaneh et al, 2011;Horiba et al, 2011;Bozzini et al, 2015) and scanning transmission X-ray microscopes (STXM) (Watts & McNeill, 2010;Leung et al, 2010;Kaulich et al, 2011;Hitchcock et al, 2012;Ohigashi et al, 2016;Prabu et al, 2018;Leontowich et al, 2018;Lü hl et al, 2019), a focused SX beam is raster-scanned over the sample (actually the sample is two-dimensionally scanned relative to the SX beam) and then each data-point is corrected separately, which results in time-consuming observations, thus an electron analyzer or an integrating X-ray spectral detector can be utilized. Among the scanning microscopes, however, STXM combined with energy-resolved X-ray fluorescence detection (STXM-XRF) (for example, Kaulich et al, 2011;Hitchcock et al, 2012;Bozzini et al, 2015;Lü hl et al, 2019) has high potentiality of simultaneous multi-element mapping for shortening long measurement time effectively.…”