Scanning tunneling microscopy head having integrated capacitive sensors for calibration of scanner displacements

Picotto, G. B.

doi:10.1116/1.589170

Cited by 17 publications

(14 citation statements)

References 7 publications

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“…New calibration systems have recently come into operation which are based on scanned probe microscopes either directly coupled to laser interferometers [71,72,73] or intermittently calibrated by them [73,74,75]. Whether use of these new systems will lead to significantly improved uncertainties for step height measurements remains to be seen.…”

Section: Discussionmentioning

confidence: 99%

Benchmarking the length measurement capabilities of the National Institute of Standards and Technology

Silver¹,

Land²,

Stone³

et al. 1998

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Section: Discussionmentioning

confidence: 99%

Benchmarking the length measurement capabilities of the National Institute of Standards and Technology

Silver¹,

Land²,

Stone³

et al. 1998

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“…Plane-parallel capacitive sensors with a gap variation design are widely integrated on single-or multi-axes positioning stages to be used with closed-loop controls of displacements up to several hundreds of micrometers. Either linear or differential set-ups of sensors are used on demand of the DOFs under control, accuracy specifications and somewhat mechanical constraints [1,2,9]. Sensors with plane-parallel electrodes suffer from the stray capacitance due to edge effects, flatness and roughness of the electrode's surfaces and from the unwanted out-of-parallelism between the electrodes.…”

Section: Accepted Manuscriptmentioning

confidence: 99%

“…Plane-parallel capacitive sensors with a gap variation design are widely integrated on single-or multi-axes positioning stages, to be used with closed-loop controls of displacements up to several hundreds of micrometers. Either linear or differential set-ups of sensors are used, based on the demand of the DOFs under control, accuracy specifications, and somewhat mechanical constraints [1,2,5].…”

Section: Introductionmentioning

confidence: 99%

Differential readings of capacitance-based controls of attitude and displacements at the micro/nano scale

Picotto¹,

Bellotti²,

Sosso³

2020

Meas. Sci. Technol.

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Four-quadrant plane capacitive sensors with electrodes made by thick metal plates were used in a novel configuration of a bridge-based circuit for measurement of both displacement and small angles over two axes. Their design, fabrication and testing by means of a differential set-up specifically designed is presented and discussed in terms of the measurement model, considering signal recovering, linearity, resolution and noise. Numerical calculations of the capacitors, including corrective terms for fringe effects and tilt between electrodes in a differential configuration, are developed to simulate the overall measuring system. Tests of the model were then performed that validated it by comparison with the results of displacement and small angle rotation runs traced by an interferometer and an autocollimator. Sensitivities of about 0,11 V/µm with a 110 -3 relative standard deviation, and of 0,13 V/mrad with a 310 -3 relative standard deviation, were determined with displacements up to ± 50 µm and yaw rotations up to ± 10 mrad.

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“…A passive resistor can be ruled out because of its parasitic capacitance. However, a high-input-impedance buffer may achieve the required properties [18]. Its input impedance may be both resistive and capacitive.…”

Section: Current-to-voltage Convertermentioning

confidence: 99%

Low-Frequency Scanning Capacitance Microscopy

Lányi

Hruškovic

1997

MRS Proc.

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The operation principle and main properties of a Scanning Capacitance Microscope (SCM) are described. It is called low-frequency, because in its design typical low-frequency techniques are utilised. The main attention is focused on its lateral resolution, signal-to-noise ratio and the possibility to detect dielectric losses.Mapping the electrostatic field of a shielded microscope probe was used to calculate the stray capacitance, flux density, sensitivity and contrast obtained on a flat conducting surface, as well as on a surface covered by a thin dielectric film. The effect of dielectric losses, represented by a parallel conductance, on the detected capacitance and the resulting phase shift has been derived.Using the results of mapping, the requirements on a SCM input stage and the possible solutions are discussed. From the point of view of frequency range and noise the best is an electrometric input stage, with input impedance represented by its capacitance.The achieved signal-to-noise ratio of the low frequency Scanning Capacitance Microscope renders the extension of the working frequency range to lower frequencies. The input stage can be optimised for a frequency range from about 1 kHz to a few MHz, with the possibility to extend it to about 10 MHz at the cost of reduced sensitivity at the lowest frequencies.

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Scanning tunneling microscopy head having integrated capacitive sensors for calibration of scanner displacements

Cited by 17 publications

References 7 publications

Benchmarking the length measurement capabilities of the National Institute of Standards and Technology

Benchmarking the length measurement capabilities of the National Institute of Standards and Technology

Differential readings of capacitance-based controls of attitude and displacements at the micro/nano scale

Low-Frequency Scanning Capacitance Microscopy

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