Scanning white-light interferometry with a supercontinuum source

Kassamakov, Ivan; Hanhijärvi, Kalle; Abbadi, Imad M.; Aaltonen, Juha; Ludvigsen, Hanne; Hæggström, E.

doi:10.1364/ol.34.001582

Cited by 26 publications

(14 citation statements)

References 23 publications

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“…Using image stitching it allows, when necessary, high resolution also across a large surface (up to 200×)18 Moreover, it can determine surface roughness Sq (ISO 25178) for an embedded surface without direct tactile access. It can measure stacked layers that are static or moving19.…”

Section: Resultsmentioning

confidence: 99%

Rapid interferometric imaging of printed drug laden multilayer structures

Sandler

Kassamakov

Ehlers

et al. 2014

Sci Rep

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The developments in printing technologies allow fabrication of micron-size nano-layered delivery systems to personal specifications. In this study we fabricated layered polymer structures for drug-delivery into a microfluidic channel and aimed to interferometrically assure their topography and adherence to each other. We present a scanning white light interferometer (SWLI) method for quantitative assurance of the topography of the embedded structure. We determined rapidly in non-destructive manner the thickness and roughness of the structures and whether the printed layers containing polymers or/and active pharmaceutical ingredients (API) adhere to each other. This is crucial in order to have predetermined drug release profiles. We also demonstrate non-invasive measurement of a polymer structure in a microfluidic channel. It shown that traceable interferometric 3D microscopy is a viable technique for detailed structural quality assurance of layered drug-delivery systems. The approach can have impact and find use in a much broader setting within and outside life sciences.

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Section: Resultsmentioning

confidence: 99%

Rapid interferometric imaging of printed drug laden multilayer structures

Sandler

Kassamakov

Ehlers

et al. 2014

Sci Rep

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“…For all other phase angles this uncertainty is larger, since the object's velocity is higher. In our case the 'instrument uncertainty' was 20 nm [16], whereas taking into account the 'illumination uncertainty' gives a measurement error of 30 nm (φ 90°). The high noise amplitude in the SC measurement is due to its low SNR compared to the SNR in the LED measurement.…”

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confidence: 75%

“…Later, we used a SC-based SWLI in a static measurement of a MEMS structure [16]. Due to its low degree of temporal coherence our SC-source performed comparably to LED and halogen sources traditionally used for SWLI [16].…”

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confidence: 99%

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Stroboscopic supercontinuum white-light interferometer for MEMS characterization

et al. 2012

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We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

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“…Incandescent lamps (with choppers), white-light light-emitting diodes (LEDs), and supercontinuum (SC) sources fulfill most of these requirements. 3,4 In SSWLI, the SWLI instrument is augmented with stroboscopic illumination and appropriate synchronization to allow dynamic characterization of oscillating samples. Samples oscillating at 2.41 MHz have been measured using SC lasers, 5 whereas a hybrid light source (nonphosphor white and cyan LED) has allowed stroboscopic measurements of a capacitive micromachined ultrasonic transducer oscillating at 2.71 MHz.…”

Section: Introductionmentioning

confidence: 99%

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

et al. 2013

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Abstract. A stroboscopic scanning white light interferometer (SSWLI) can characterize both static features and motion in micro(nano)electromechanical system devices. SSWLI measurement results should be linked to the meter definition to be comparable and unambiguous. This traceability is achieved by careful error characterization and calibration of the interferometer. The main challenge in vertical scale calibration is to have a reference device with reproducible out-of-plane movement. A piezo-scanned flexure guided stage with capacitive sensor feedback was attached to a mirror and an Invar steel holder with a reference plane-forming a transfer standard that was calibrated by laser interferometry with 2.3 nm uncertainty. The moving mirror vertical position was then measured with the SSWLI, relative to the reference plane, between successive mirror position steppings. A lightemitting diode pulsed at 100 Hz with 0.5% duty cycle synchronized to the CCD camera and a halogen light source were used. Inside the scanned 14 μm range, the measured SSWLI scale amplification coefficient error was 0.12% with 4.5 nm repeatability of the steps. For SWLI measurements using a halogen lamp, the corresponding results were 0.05% and 6.7 nm. The presented methodology should permit accurate traceable calibration of the vertical scale of any SWLI.

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Scanning white-light interferometry with a supercontinuum source

Cited by 26 publications

References 23 publications

Rapid interferometric imaging of printed drug laden multilayer structures

Rapid interferometric imaging of printed drug laden multilayer structures

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

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