Scheduling of single-arm cluster tools mixedly processing two kinds of wafers

Leng, Tingting; Wang, Jufeng; Liu, Chunfeng

doi:10.1109/icnsc55942.2022.10004192

2022 IEEE International Conference on Networking, Sensing and Control (ICNSC) 2022

DOI: 10.1109/icnsc55942.2022.10004192

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Scheduling of single-arm cluster tools mixedly processing two kinds of wafers

Tingting Leng

Jufeng Wang

Chunfeng Liu

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Scheduling of single-arm cluster tools mixedly processing two kinds of wafers

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References 17 publications

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