<scp>MEMS</scp>‐ and<scp>MOEMS</scp>‐Based Near‐Infrared Spectrometers

Antila, Jarkko; Tuohiniemi, Mikko; Rissanen, Anna; Kantojärvi, Uula; Lahti, Markku; Viherkanto, Kai; Kaarre, Marko; Malinen, Jouko

doi:10.1002/9780470027318.a9376

Cited by 24 publications

(19 citation statements)

References 104 publications

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“…According to the requirements of chemical analysis applications, the resolutions of MEMS based FTS must be 100 cm −1 or better [24]. Equation 3yields that the needed OPD has to be over 100 µm, thus, corresponding the movable mirror needs to travel more than 50 µm, which is a big challenge for MEMS microactuators.…”

Section: Fourier Transform Spectrometers Based On Mems Mirrorsmentioning

confidence: 99%

Review of MEMS Based Fourier Transform Spectrometers

et al. 2020

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Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental monitoring and national border security, such as explosive detection. However, because of being bulky and expensive, they are usually used in test centers and research laboratories. Miniaturized FTS have been developed rapidly in recent years, due to the increasing demands. Using micro-electromechanical system (MEMS) micromirrors to replace the movable mirror in a conventional FTS system becomes a new realm. This paper first introduces the principles and common applications of conventional FTS, and then reviews various MEMS based FTS devices.

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Section: Fourier Transform Spectrometers Based On Mems Mirrorsmentioning

confidence: 99%

Review of MEMS Based Fourier Transform Spectrometers

et al. 2020

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“…[3] There are some typical requirements for instrumentation for the NIR applications, although the right combination is much application-dependent. For example a typical requirement for wavelength stability when temperature changes is 0.01-0.1 nm/°C [2] .…”

Section: Starting Point and Spectral Sensor Characteristicsmentioning

confidence: 99%

“…Typical philosophy here is to take a well-known spectroscopy platform, such as Fourier Transform Spectrometer (FTS, or FTIR), Fabry-Perot Interferometer (FPI) or dispersive elements such as gratings, and apply clean room processes (thin film deposition, etching, nanoimprinting) in order to create highly compact spectrometers. [2] In this paper we present a MEMS FPI based spectral sensor, its design and application along with critical performance factors.…”

Section: Introductionmentioning

confidence: 99%

Advanced MEMS spectral sensor for the NIR

Antila¹,

Kantojärvi²,

Mäkynen³

et al. 2015

SPIE Proceedings

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Near Infrared (NIR) spectrometers are widely used in many fields to measure material content, such as moisture, fat and protein in grains, foodstuffs and pharmaceutical powders. These fields include applications where only highly miniaturized and robust NIR sensors can be used due to small usable space, weight requirements and/or hostile working environment. Handheld devices for material inspection, online process automation and automotive industry introduce requirements for size, robustness and cost, which is currently difficult to meet. In this paper we present an advanced spectral sensor based on a tunable Microelectromechanical (MEMS) Fabry-Perot Interferometer. The sensor is fibercoupled, weighs 125 grams and fits to an envelope of 25x55x55 mm 3 . Three types of sensors cover the wavelength ranges from 1.35-1.7 µm, 1.55-2.0 µm and 1.7-2.2 µm, utilizing only a single pixel extended InGaAs detector, avoiding the expensive linear array detectors. We describe the design, principle of operation and calibration methods together with the control schemes. Some environmental tests are described and their results and finally application measurement results are presented along with discussion and conclusions.

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“…This makes NIR spectroscopy much more attractive and creates a potential to enable completely new applications for the measurement technique. Different instrument technologies are available, with the most widespread being Fourier transform, Fabry-Pérot (FP), and dispersive spectrometers [16]. In recent years, the potential of microspectrometer technology has already been demonstrated in spectroscopy [17,18], hyperspectral imaging [19], and compressive sensing [20] applications.…”

Section: Introductionmentioning

confidence: 99%

Probeless non-invasive near-infrared spectroscopic bioprocess monitoring using microspectrometer technology

et al. 2019

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Real-time measurements and adjustments of critical process parameters are essential for the precise control of fermentation processes and thus for increasing both quality and yield of the desired product. However, the measurement of some crucial process parameters such as biomass, product, and product precursor concentrations usually requires time-consuming offline laboratory analysis. In this work, we demonstrate the in-line monitoring of biomass, penicillin (PEN), and phenoxyacetic acid (POX) in a Penicillium chrysogenum fed-batch fermentation process using low-cost microspectrometer technology operating in the near-infrared (NIR). In particular, NIR reflection spectra were taken directly through the glass wall of the bioreactor, which eliminates the need for an expensive NIR immersion probe. Furthermore, the risk of contaminations in the reactor is significantly reduced, as no direct contact with the investigated medium is required. NIR spectra were acquired using two sensor modules covering the spectral ranges 1350-1650 nm and 1550-1950 nm. Based on offline reference analytics, partial least squares (PLS) regression models were established for biomass, PEN, and POX either using data from both sensors separately or jointly. The established PLS models were tested on an independent validation fed-batch experiment. Root mean squared errors of prediction (RMSEP) were 1.61 g/L, 1.66 g/L, and 0.67 g/L for biomass, PEN, and POX, respectively, which can be considered an acceptable accuracy comparable with previously published results using standard process spectrometers with immersion probes. Altogether, the presented results underpin the potential of low-cost microspectrometer technology in real-time bioprocess monitoring applications.

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MEMS‐ andMOEMS‐Based Near‐Infrared Spectrometers

Cited by 24 publications

References 104 publications

Review of MEMS Based Fourier Transform Spectrometers

Review of MEMS Based Fourier Transform Spectrometers

Advanced MEMS spectral sensor for the NIR

Probeless non-invasive near-infrared spectroscopic bioprocess monitoring using microspectrometer technology

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