Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS

Akiyama, T.; Collard, Dominique; Fujita, Hiroyuki

doi:10.1109/84.557525

Cited by 183 publications

(83 citation statements)

References 16 publications

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“…This drawback is due to charge accumulation in the dielectric, and it can be limited by alternating the polarity of the command on each electrode [33]. This function is realized by the out + /− block of Fig.…”

Section: Table I Characteristics Of the Receiver Antennasmentioning

confidence: 99%

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Basset

Kaiser

Legrand

et al. 2007

IEEE/ASME Trans. Mechatron.

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Section: Table I Characteristics Of the Receiver Antennasmentioning

confidence: 99%

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Basset

Kaiser

Legrand

et al. 2007

IEEE/ASME Trans. Mechatron.

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“…In these motors, the propulsion and the clamping are dissociated to allow for individual optimization of these two mechanisms. These motors have inherently more accurate positioning and higher reliability than scratch drives [14][15][16] and impact micromotors [17]. They also produce larger output forces than frictionless 3-phase stepper motors [18,19].…”

Section: Introductionmentioning

confidence: 99%

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

et al. 2010

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Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, electrically grounded surface. By combining the novel design with an innovative micromachining method based on vertical trench isolation, we have greatly simplified the fabrication of the shuffle motors and significantly improved their overall performance characteristics and reliability. Depending on the propulsion voltage, our motor with external dimensions of 290 m × 410 m displays two distinct operational modes with adjustable step sizes varying respectively from 0.6 to 7 nm and from 49 to 62 nm. The prototype was driven up to a cycling frequency of 80 kHz, showing nearly linear dependence of its velocity with frequency and a maximum velocity of 3.6 mm/s. For driving voltages of 55 V, the device had a maximum travel range of 70 m and exhibited an output force of 1.7 mN, resulting in the highest force and power densities reported so far for an electrostatic micromotor. After five days of operation, it had traveled a OPEN ACCESSMicromachines 2010, 1 49 cumulative distance of more than 1.5 km in 34 billion steps without noticeable deterioration in performance.

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“…The friction difference between a bushing and a flat plate was used to move a scratch drive actuator (SDA) (10) . The structure and operational sequence are illustrated in Fig.…”

Section: Scratch Drive Actuatormentioning

confidence: 99%

Evolution from MEMS-based Linear Drives to Bio-based Nano Drives

Fujita

2006

IEEJ Trans. IA

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The successful extension of semiconductor technology to fabricate mechanical parts of the sizes from 10 to 100 micrometers opened wide ranges of possibilities for micromechanical devices and systems. The fabrication technique is called micromachining. Micromachining processes are based on silicon integrated circuits (IC) technology and used to build three-dimensional structures and movable parts by the combination of lithography, etching, film deposition, and wafer bonding. Microactuators are the key devices allowing MEMS to perform physical functions. Some of them are driven by electric, magnetic, and fluidic forces. Some others utilize actuator materials including piezoelectric (PZT, ZnO, quartz) and magnetostrictive materials (TbFe), shape memory alloy (TiNi) and bio molecular motors.This paper deals with the development of MEMS based microactuators, especially linear drives, following my own research experience. They include an electrostatic actuator, a superconductive levitated actuator, arrayed actuators, and a bio-motor-driven actuator. I started the investigation of MEMS in 1886. The study on microactuators has been one of the major activities in my laboratory. The development of novel micromachining technology has been conducted intensively in order to realize microactuators. The first fully micromachined actuator in my laboratory was an electrostatic comb drive. An example of a comb drive is shown in Fig. 1. The actuator utilized electrostatic pulling force between two interdigited comb-like fingers, one set was fixed to the substrate and the other set was attached to the moving part. The actuator typically generated the force of 10-100 micro-N and the displacement of 1-10 micrometers.The cilialy motion conveyor mimics the motion of cilia in living organisms. We fabricated an array of microactuators which are thermally driven bimorphic cantilevers. When Joule heating in the heater relaxes the thermal stress, the curled cantilever becomes flat. Thus the tip goes up and down. The dimensions of the cantilever are: 500 micrometers in length, 100 micrometers in width Linear bio motors consisting of two proteins, i.e. kinesin and microtubule, were attached to MEMS structures and substrates, respectively. Thus, we could build a transportation device driven by bio motors. When kinesin-coated structures are placed on the microtubule, kinesin generates force and convey those objects (Fig. 2). The energy for bio motors is supplied by ATP molecules in water. On and off control of the motion of micro beads was successfully demonstrated by adding ATP molecules and removing them from the solution. We also succeeded the aligned immobilization of microtubules on the substrate or in the micro channel. It was possible to convey objects in the pre-determined direction with this technology.When micromachining technology and microactuator design were established, the applications were pursued. A needle attached to a microactuator was brought into the close vicinity (less than a few nanometers) from the stationary electrode;...

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Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS

Cited by 183 publications

References 16 publications

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

Evolution from MEMS-based Linear Drives to Bio-based Nano Drives

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