Scratch-induced deformation and damage behavior of doped diamond-like carbon films under progressive normal load of Vickers indenter

Liu, Ming; Yan, Fuwen

doi:10.1016/j.tsf.2022.139351

Cited by 9 publications

(3 citation statements)

References 92 publications

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“…The increasing trend in Young’s modulus and hardness is attributed to the increasing order of the sp 3 phase (diamond phase) in the DLC patterns. However, since the DLC patterns were made from the hydrocarbon source (ethanol), hydrogenation in the carbon structures is the dominant factor for their softness and results in comparable mechanical strengths as reported in other studies. − …”

Section: Resultsmentioning

confidence: 60%

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

et al. 2023

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Submerged plasma-assisted discharge direct patterning of diamond-like carbon (DLC) onto the silicon substrate in ambient conditions has succeeded as a new and novel soft solution process. In this environmentally benign technique, a copious amount of pure ethanol (ca. 4 mL) was locally activated with a maximum of ca. 0.23 mkWh by an aselectrochemically synthesized ultrasharp tungsten tip. With the assisted submerged plasma, the decomposed ethanol molecules are anodically patterned directly onto the silicon substrate in ambient conditions. The physical nature of DLC patterns was accessed by profilometry, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy analysis. Furthermore, Fourier-transform infrared, Raman, and X-ray photoelectron spectra were analyzed for chemical compositions and structures, such as surface functionalization, carbon−carbon bonding, and sp 2 −sp 3 ratio, respectively. From a Berkovich-configured nanoindentation analysis, Young's modulus and hardness have shown increasing trend with increasing sp 3 −sp 2 ratio in DLC patterns of 68.5 and 2.8 GPa, respectively. From the electrochemical cyclovoltammetry analysis, a maximum areal specific capacitance of 205.5 μF/cm 2 has been achieved at a scan rate of 5 mV/s. The one-step, green, and environmentally sustainable approach of rapid formation of DLC patterns is thus a promising technique for various carbon-based electrode fabrication processes.

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Section: Resultsmentioning

confidence: 60%

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

et al. 2023

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“…Values of KC obtained by Liu's ESEL are about twice those obtained by LEFM for both spherical and Berkovich indenters, and KC obtained by Liu's ESEL can be regarded to be the fracture toughness measured under plane stress condition, which is larger than that measured under plain strain condition [165]. A simple modification of Liu's ESEL can also render fracture toughness close to that obtained by LEFM, and Liu's MESEL model is more suitable to characterize metals of large fracture toughness [166].…”

Section: Scratch-based Methodologiesmentioning

confidence: 65%

Micromechanical characterization of microwave dielectric ceramic BaO–Sm₂O₃–5TiO₂by indentation and scratch methods

Liu¹,

Xu²

2023

Journal of Advanced Ceramics

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Mechanical characterization of dielectric ceramics, which have drawn extensive attention in wireless communication, remains challenging. Micromechanical properties with microstructures of dielectric ceramic BaO-Sm2O3-5TiO2 (BST) were assessed by nanoindentation, microhardness, and microscratch tests under different indenters, along with X-ray diffraction, scanning electron microscopy, and Raman spectroscopy. Accurate determination of elastic modulus (i.e., 260 GPa) and indentation hardness (i.e., J u s t A c c e p t e d 16.2 GPa) of brittle BST ceramic by instrumented indentation technique requires low loads with little indentation-induced damage. Elastic modulus and indentation hardness were analyzed by different methodologies such as energybased and displacement-based approaches, and elastic recovery of Knoop imprint. Consistent values (about 3.1 MPa·m 1/2 ) of fracture toughness of BST ceramic were obtained by different methods such as Vickers indenter-induced cracking method, energy-based nanoindentation approaches, and linear elastic fracture mechanics-based scratch approach with a spherical indenter, demonstrating successful applications of indentation and scratch methods in characterizing fracture properties of brittle solids. The deterioration of elastic modulus or indentation hardness with the increase in indentation load is caused by indentation-induced damage, and can be used to determine fracture toughness of material by energy-based nanoindentation approaches, and the critical void volume fraction is 0.27 (or 0.18) if elastic modulus (or indentation hardness) of the brittle BST ceramic is used. The fracture work at the critical load corresponding to the initial decrease in elastic modulus or indentation hardness can also be used to assess fracture toughness of brittle solids, opening new venues of application of nanoindentation test as a means to characterize fracture toughness of brittle ceramics.

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“…The toughness of a DLC film depends on both the energy absorption capacity and cohesive force of the film. In fact, the film toughness relates to the energy states as well as to the stress states of the tips of cracks before and after fracture of a film [48][49][50][51]. We have to take both energy and stress aspects into account during toughness characterization under complex working conditions.…”

Section: Toughness Characterizationmentioning

confidence: 99%

Toughness Characterization and Toughening Mechanism of Diamond-like Carbon Films

Yu,

Wang,

Hou

et al. 2023

Preprint

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Diamond-like carbon (DLC) films have a promising tribological application in green precision manufacturing, but their toughness represents a serious issue in the way of their application perspective. The film thickness is on the micrometer scale and makes conventional methods unsuitable for its toughness characterization. The absence of an accepted method for characterizing the DLC toughness has hindered the related research on the development of toughening methods and understanding the mechanism. This work intends to explore a relatively simple and acceptable characterization method to measure the film toughness. Moreover, toughening mechanisms of DLC films are proposed during the characterization to reveal the toughening mechanism. The toughness can be fully characterized through combining impact toughness and scratch toughness. The impact toughness can be obtained by observing the size of the indentation and the crack state around the indentation in the impact experiment. The scratch toughness could be assessed by combining the scratch morphology and Crack Propagation Resistance (CPRS). The improvement of film toughness should be carried out from two aspects: preventing microcrack initiation and suppressing crack propagation. Appropriate doping of non-carbide metal particles can effectively improve the toughness of the film, and there are seven main factors affecting the toughening of the film. Five toughening mechanisms of non-carbide metals from film preparation to test stage are revealed during the investigation of the change patterns.

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Scratch-induced deformation and damage behavior of doped diamond-like carbon films under progressive normal load of Vickers indenter

Cited by 9 publications

References 92 publications

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

Micromechanical characterization of microwave dielectric ceramic BaO–Sm₂O₃–5TiO₂by indentation and scratch methods

Toughness Characterization and Toughening Mechanism of Diamond-like Carbon Films

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Scratch-induced deformation and damage behavior of doped diamond-like carbon films under progressive normal load of Vickers indenter

Cited by 9 publications

References 92 publications

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

Micromechanical characterization of microwave dielectric ceramic BaO–Sm2O3–5TiO2by indentation and scratch methods

Toughness Characterization and Toughening Mechanism of Diamond-like Carbon Films

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Micromechanical characterization of microwave dielectric ceramic BaO–Sm₂O₃–5TiO₂by indentation and scratch methods