Scratch–wear resistance of nanoscale super thin carbon nitride overcoat evaluated by AFM with a diamond tip

Bai, Mingwu; Kato, Koji; Umehara, Noritsugu; Miyake, Y.; Xu, Junguo; Tokisue, Hiromitsu

doi:10.1016/s0257-8972(99)00656-8

Cited by 32 publications

(21 citation statements)

References 22 publications

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“…In this paper, the contact deformation and wear characteristics of smooth and DTR media are investigated using nano-indentation and nano-scratch testing (Jiang et al 1995;Anoikin et al 1998;Li and Bhushan 1999;Sundararajan and Bhushan 1999;Bai et al 2000;Bhushan 1999;Huang et al 2001). The deformation of the land area between adjacent grooves is investigated as a function of land width and applied load.…”

Section: Introductionmentioning

confidence: 99%

Investigation of contact deformation and wear characteristics of discrete track recording media

Yoon

Talke

2011

Microsyst Technol

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The contact deformation and wear characteristics of smooth and discrete track recording (DTR) media are investigated using nano-indentation and nano-scratch testing. Plastic deformation of the land areas between adjacent grooves was found to be substantially larger than in the smooth regions of the same disk. Reciprocating wear tests showed that wear was more severe for discrete track disks than for smooth disks. To improve the tribology of DTR media, planarization of discrete track disks appears to be necessary.

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Section: Introductionmentioning

confidence: 99%

Investigation of contact deformation and wear characteristics of discrete track recording media

Yoon

Talke

2011

Microsyst Technol

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“…The various deposition methods result in a variety of diamond-like films. Widely used are hydrogenated diamond-like carbon (DLC or a-C:H) [11], nitrogen-doped amorphous carbon (a-C:N) [12] or amorphous carbon nitride (CN x ) [13][14][15], hydrogenated carbon nitride (CH x N y ), hydrogen-free amorphous carbon (a-C) [16], silicon-doped amorphous carbon (a-C:Si) or silicon carbide (SiC) [17], and metal-doped amorphous carbon (a-C:Me) [18]. Amorphous carbon films (a-C) that have more than 80% tetrahedral (sp 3 ) bonding are referred to as tetrahedral amorphous carbon (ta-C) [7,9,19], or sometimes even as "amorphous diamond."…”

Section: Introductionmentioning

confidence: 99%

Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs

Anders

Fong

Kulkarni

et al. 2001

IEEE Trans. Plasma Sci.

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Ultrathin (< 5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gbit/in 2 . These films are used as overcoats to protect the magnetic layers on disk media and the active elements of the read-write slider. Tetrahedral amorphous carbon films can be produced by filtered cathodic arc deposition, but the films will only be accepted by the storage industry only if the "macroparticle" issue has been solved. Better plasma filters have been developed over recent years. Emphasis is put on the promising twist filter system -a compact, open structure that operates with pulsed arcs and high magnetic field. Based on corrosion tests it is shown that the macroparticle reduction by the twist filter is satisfactory for this demanding application, while plasma throughput is very high. Ultrathin hard carbon films have been synthesized using Sfilter and twist filter systems. Film properties such as hardness, elastic modulus, wear, and corrosion resistance have been tested. Index Terms: diamond-like carbon, cathodic vacuum arc, macroparticle filtering, magnetic storage, carbon overcoats 3 I. INTRODUCTIONUltrathin (< 5 nm) hard carbon films are used as protective overcoats on hard disks and readwrite heads. The tribological properties of the head-disk interface are not only of mechanical but also of chemical nature: the overcoat should protect the magnetic layers against wear and corrosion [1, 2]. The areal density of information stored in disk drive products increased at an amazing rate of over 65% for many years rate, and continues to accelerate to even greater rates [3]. To accomplish this, the "magnetic spacing" between the magnetic layers of the disk and read/write sensor of the head must continue to decrease. The magnetic spacing includes the overcoats, lubrication, and the fly height. Thinner overcoats allow the read-write head to be closer to the magnetic layer of the disk, and hence, the size of individual bits on the disk to be smaller. As we work toward an areal density of 100 Gbit/in 2 , the magnetic spacing approaches the sub-10-nm regime (pseudo-contact recording) and overcoat thickness must shrink to 1-2 nm. Overcoats currently used are sputtered or ion-beam deposited diamond-like carbon films, typically doped with hydrogen or nitrogen. They cease to provide acceptable levels of corrosion protection when the film thickness is less than 5 nm.Overcoats need to be tough (hard and elastic), chemically inert, pinhole-free, and compatible with the lubricant. The challenge of ultrathin film synthesis is to make the films as thin as possible and still continuous, as opposed to an assembly of islands.Nucleation and growth of ultrathin films is a field of intense research. For carbon, it is well known that films that are rich in sp 3 (diamond) bonds should be grown in a kinetic mode at low temperature (less than 200°C, preferably room temperature), with film-forming carbon atoms or ions having an energy of about 100 eV. This energy is optimized for subplantat...

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“…The various deposition methods result in a variety of diamondlike films. Widely used is hydrogenated diamondlike carbon (DLC or a-C:H), nitrogendoped amorphous carbon (a-C:N) or amorphous carbon nitride (CNx) [1][2][3], hydrogenated carbon nitride (CHXNy), non-hydrogenated amorphous carbon (a-C), silicon-doped amorphous carbon (a-C:Si) or silicon carbide (SiC) [4], and metal-doped amorphous carbon (a-C:Me) [5]. Amorphous carbon films (a-C) often have a very high percentage of tetrahedral (sp 3 ) bonding and therefore they are referred to as tetrahedral amorphous carbon (ta-C).…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Ultrathin Ta-C Films by Twist-Filtered Cathodic Arc Carbon Plasmas

Anders

Kulkarni

2001

MRS Proc.

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The application of cathodic-arc-deposited films has been very slow due to the infamous macroparticle problem. We report about the application of the open Twist Filter as the key component to an advanced filtered cathodic arc system. Ultrathin tetrahedral amorphous carbon (ta-C) films have been deposited on 6 inch wafers. Film properties have been investigated with respect to application in the magnetic data storage industry. Films can be deposited in a reproducible manner where film thickness control relies on arc pulse counting once deposition rates have been calibrated. Films of 3 nm thickness have been deposited that passed acid and Battelle corrosion tests. Monte Carlo Simulation of energetic carbon deposition shows the formation of an intermixed transition layer of about I inm. The simulation indicates that because the displacement energy of carbon is not smaller than of magnetic materials, films thinner than 2 nm are either not high in sp 3 content or represent a carbidic phase, i.e. contain substrate material. The last finding is general and not limited to cathodic arc deposited ta-C films.

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Scratch–wear resistance of nanoscale super thin carbon nitride overcoat evaluated by AFM with a diamond tip

Cited by 32 publications

References 22 publications

Investigation of contact deformation and wear characteristics of discrete track recording media

Investigation of contact deformation and wear characteristics of discrete track recording media

Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs

Synthesis of Ultrathin Ta-C Films by Twist-Filtered Cathodic Arc Carbon Plasmas

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