Second-harmonic generation using d₃₃ in periodically poled lithium niobate microdisk resonators

Abstract

A fabrication process allowing for the production of periodically poled lithium niobate (PPLN) photonic devices with any domain pattern and unit size down to 200 nm is developed by combining semiconductor fabrication techniques and piezo-force-microscopy tips polarization. Based on this fabrication process, PPLN microdisk resonators with quality factors of 8 × 10 4 were fabricated from a Z-cut lithium niobate film. Second-harmonic generation (SHG) utilizing d 33 in the whole cavity was demonstrated in a PPLN microdisk with a 2 μm-spatial-period radial domain pattern. The SHG conversion efficiency was measured to be 1.44 × 10 − 5 mW − 1 . This work paves the way to fabricate complex PPLN photonic devices and to obtain efficient nonlinear optical effects that have wide applications in both classical and quantum optics.

Microdisk lasers on an erbium-doped lithium-niobite chip

“…With the assistance of chemomechanical polishing (CMP), the quality (Q) factors of LNOI microdisk cavities have been recently improved up to 10 7 [5,6], and the propagating loss of the LNOI waveguide has been reduced to as low as 0.027 dB/cm [7]. Using the nonlinearity of LN, various nonlinear optical effects, including sum frequency generation, second harmonic generation, difference frequency generation, and four-wave mixing, have been realized in LNOI microdisks, microrings, and waveguides [8][9][10][11][12][13][14][15][16][17]. Integrated LN electro-optic modulators with high operating frequencies and CMOS-compatible voltages have also been designed [18].…”

Nonlinear wave mixing in lithium niobate thin film

“…Poling of LNTF with a period of 747 nm was reported by optimized bipolar preconditioning [64], which may also apply to shorter period poling. And poled LNTF even with periods down to 200 nm has also been successfully demonstrated using the PFM method [29]. Backward QPM scheme is thus accessible in LNTF.…”

“…Attracting approaches also involves electron beam writing, femtosecond laser direct writing, and atomic force microscope, which has been achieved at bulk surfaces [25][26][27][28] and is also applicable for LNTF. For example, Zhenzhong Hao et al have demonstrated domain engineering in LNTF microdisks by using piezoresponse force microscopy (PFM) [29].…”

Microresonators in Lithium Niobate Thin Films

“…With the energy conservation ω s = 2ω p , the perfect phase matching condition requires the refractive indexes of pump and signal laser to fulfil n(ω s ) = n(ω p ). To compensate the phase mismatching, techniques such as modal phase matching (MPM), [95,96] cyclic phase matching (CPM) [97,98] and quasi phase matching (QPM) [99][100][101][102] have been developed in LN thin film microresonators.…”