Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristics

Abstract

Articles you may be interested inViscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations J. Appl. Phys. 110, 094511 (2011); 10.1063/1.3657781Mass sensitivity of thin film bulk acoustic resonator sensors based on polar c-axis tilted zinc oxide and aluminum nitride thin film Field and temperature dependent parameters of the dc field induced resonances in Ba x Sr 1 − x Ti O 3 -based tunable thin film bulk acoustic resonatorsIn this article, the authors describe a novel fabrication technique of ZnO-based film bulk acoustic resonator ͑FBAR͒ devices using a new type of multilayered Bragg reflector with very thin chromium ͑Cr͒ layers additionally formed between silicon dioxide ͑SiO 2 ͒ and tungsten ͑W͒ layers. Each Cr layer is considered to enhance the adhesion between the SiO 2 and W layers. The fabricated FBAR devices are shown to operate at the frequency range of 2.7-3.0 GHz, along with good return loss as well as high Q factors. Furthermore, various thermal treatments are performed to further improve the resonant characteristics of the FBAR devices, and also their effects on the device characteristics are investigated. At the second-order resonant frequency, excellent resonant characteristics are observed in terms of high return loss and good figure of merit. This feasibility study indicates that the novel fabrication technique can be useful for future broadband mobile worldwide interoperability for microwave access applications.

A Computational Study of Aspects of ZnO Nanorod Film Electro-Crystallisation

“…The breadth of nanostructures formed by ZnO is breathtaking, and includes rods [6], needles [7,8], plates [9], flowers [10], belts [1], and helices [11]. Examples of reported nanodevices include field emission transistors [12,13], ultrasensitive gas sensors [14], cantilevers [15], resonators [16,17], transducers [18], actuators [19], LEDs [20], and lasers [21]. Studies have found the properties of ZnO crystals to be intricately related to their size and shape [22].…”

A Computational Study of Aspects of ZnO Nanorod Film Electro-Crystallisation

“…The breadth of nanostructures formed by ZnO is breathtaking, and includes rods [6], needles [7,8], plates [9], flowers [10], belts [1], and helices [11]. Examples of reported nanodevices include field emission transistors [12,13], ultrasensitive gas sensors [14], cantilevers [15], resonators [16,17], transducers [18], actuators [19], LEDs [20], and lasers [21]. Studies have found the properties of ZnO crystals to be intricately related to their size and shape [22].…”