Seed layer stimulated growth of crystalline high Al containing (Al,Cr)2O3 coatings deposited by cathodic arc evaporation

Pohler, Markus; Franz, Robert; Ramm, J.; Polcik, P.; Mitterer, Christian

doi:10.1016/j.tsf.2013.10.125

Cited by 33 publications

(8 citation statements)

References 44 publications

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“…Cathodic arc deposition is a frequently applied physical vapour deposition technique to synthesise hard coating materials like TiAlN [1][2][3], AlCrN [4,5] or AlCrO [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Franz

Martín

Hawranek

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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AlxCr1−x composite cathodes with Al contents of x = 0.75, 0.5 and 0.25 were exposed to cathodic arc plasmas in Ar, N2 and O2 atmospheres and their erosion behaviour was studied. Cross-sectional analysis of the elemental distribution of the near-surface zone in the cathodes by scanning electron microscopy revealed the formation of a modified layer for all cathodes and atmospheres. Due to intermixing of Al and Cr in the heat-affected zone, intermetallic Al-Cr phases formed as evidenced by X-ray diffraction analysis. Cathode poisoning effects in the reactive N2 and O2 atmospheres were non-uniform as a result of the applied magnetic field configuration. With the exception of oxide islands on Al-rich cathodes, reactive layers were absent in the circular erosion zone, while nitrides and oxides formed in the less eroded centre region of the cathodes.

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“…Cathodic arc deposition is a frequently applied physical vapour deposition technique to synthesise hard coating materials like TiAlN [1][2][3], AlCrN [4,5] or AlCrO [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Franz

Martín

Hawranek

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…Unfortunately, the consistence of droplets embedded in thin TEM lamella leads to difficulties which prevent further detailed investigations on the interface between the droplet surface and the ongrowing hexagonal crystallites. According to electron energy loss-spectroscopy, we can conclude that α-Cr2O3 and Fe2O3 locally formed at the particles give rise for subsequent facilitated hexagonal growth of (Al,Cr,Fe)2O3, similar to the process which was observed for the template supported growth of hexagonal Al2O3 and (Al,Cr)2O3 growth [6][7][8]. In addition, Zhang et al [17] studied the formation of a thermally-grown α-Al2O3 scale on Al8Cr5.…”

Section: Resultsmentioning

confidence: 64%

“…Prevention of multi-phased and cubic-dominated coatings can either be achieved by suitable templates, e.g. Cr2O3 seed-layers [7,8], or by alloying Cr [9]. These effects base on structural similarities of α-Al2O3 and α-Cr2O3.…”

Section: Introductionmentioning

confidence: 99%

Triggering the Phase Evolution Within (Al,Cr)2O3-based Coatings by Alloying and Microstructural Concepts

Koller

Hahn

Widrig

et al. 2016

Berg Huettenmaenn Monatsh

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Abstract:The synthesis of (Al,Cr)2O3 coatings by PVD frequently results in metastable cubic structures next to the thermodynamically stable and mechanically favourable hexagonal corundum phase. By alloying small amounts of Fe to powder-metallurgically produced Al0.7Cr0.3 targets -used to synthesise (Al,Cr)2O3 films by cathodic arc evaporation -a considerable increase of the hexagonal phase fraction is observed. Detailed transmission electron microscopy studies show that the growth of hexagonal crystallites of a solid solution (Al,Cr,Fe)2O3 can be triggered by small Cr-and Fe-enriched spherical particles, so-called droplets. In contrast, larger spherical or flat-shaped Alrich droplets induce re-nucleation of undesired cubic film growth. Extending these studies to additional (Al,Cr)2O3 coating systems revealed similar mechanisms, albeit by far less frequent than in the case of Fe-alloyed films. Modifications of the chemical composition of the target by small amounts of dopants may reduce droplet generation and contribute to controlled coating nucleation. Therefore, the cathode surface used is compared with particles, intentionally selected from the plasma stream. Keywords

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“…Defects associated with PVD growth, like point defects, promotes the cubic oxides [109]. Introducing start layers with 75 at.% Cr content have been shown to promote corundum structure growth for as high as 85 at.% Al-containing coatings [110] as well as tailoring of the bias level [111]. A transition from the cubic B1-like structure to the thermodynamically stable corundum structure has been observed during growth [57,110,112].…”

Section: Pseudobinary and -Ternary Oxidesmentioning

confidence: 99%

Physical vapor deposition and thermal stability of hard oxide coatings

Landälv

2019

Linköping Studies in Science and Technology. Dissertations

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Cover images Front side from the left-The magnetron sputtering system used in Paper I to deposit Al-V-O-coatings-Si-rich droplet in as-deposited Al-Cr-Si-O coatings adapted from Figure 4b in Paper II. Sirich marked yellow. STEM micrograph and EDX map merged and rotated 90° CCW from paper II for better fit on the front cover.-Crystalline Cr (red) and Zr (green) segregation observed in a Cr-Zr-O coating after vacuum annealing at 810 °C. Adapted from Figure 10b in paper IV. STEM micrograph (top) and EDX map (bottom). Background image on front and backside Light optical microscope image of Al-V-O-coating after annealing in air at 700 °C, adapted to background image with filter and blue color. V2O5 crystals grown on the γ-Al2O3 coating. Magnification of part of Figure 4 in Paper I (sample with 18 at.% metal fraction V, sample F). Interesting for its beauty rather than industrial application.

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Seed layer stimulated growth of crystalline high Al containing (Al,Cr)2O3 coatings deposited by cathodic arc evaporation

Cited by 33 publications

References 44 publications

Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Triggering the Phase Evolution Within (Al,Cr)2O3-based Coatings by Alloying and Microstructural Concepts

Physical vapor deposition and thermal stability of hard oxide coatings

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