2016
DOI: 10.1017/s1431927616003731
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Selective Detection of Backscattered Electrons in the Compound Lens Equipped UHR SEM

Abstract: Detection of signal electrons belongs amongst the key parameters of the Scanning Electron Microscope (SEM). The traditional approach is the ETD detector for secondary electrons (SE) and a below-the-lens detector for backscattered electrons (BSE). State-of-the-art SEMs can be equipped with up to three inlens detectors capable of collecting both the SE and BSE signal. Moreover, the possibility to sort electrons according to their energies and/or emission angles is becoming common. Such a selective detection is u… Show more

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Cited by 3 publications
(5 citation statements)
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“…Modern SEMs now contain multiple out‐lens and in‐lens detectors, which filter the signal based on varying kinetic energy and emission angles. This filtering provides enhanced contrast and visualization of features which would otherwise have been missed in an unfiltered image 32,33 . An in‐lens detector called Trinity (T1) was applied in this study because it produced minimally charged back scatter electron images of the nonconductive samples 33 .…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…Modern SEMs now contain multiple out‐lens and in‐lens detectors, which filter the signal based on varying kinetic energy and emission angles. This filtering provides enhanced contrast and visualization of features which would otherwise have been missed in an unfiltered image 32,33 . An in‐lens detector called Trinity (T1) was applied in this study because it produced minimally charged back scatter electron images of the nonconductive samples 33 .…”
Section: Experimental Methodsmentioning
confidence: 99%
“…This filtering provides enhanced contrast and visualization of features which would otherwise have been missed in an unfiltered image. 32,33 An in-lens detector called Trinity (T1) was applied in this study because it produced minimally charged back scatter electron images of the nonconductive samples. 33 To further mitigate charging, copper tape was wrapped around edges of the sample mounts prior to imaging.…”
Section: Microstructure Analysismentioning
confidence: 99%
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“…Compositional contrast delivered by the BSE depends on their angular and energy distribution. BSE emitted along the optical axis or at energies close to the energy of the primary beam ensure the strongest compositional contrast [2]. Trinity system offers several ways of maximizing the compositional contrast.…”
mentioning
confidence: 99%
“…Naturally, good compositional contrast is fundamental. All these requirements are fulfilled by sensitive T1 in-lens BSE detector collecting large solid angle and enabling energy filtering to strengthen the contrast or filter the charge [5]. Ability of the T1 BSE detector in polymer research is demonstrated by resolving the chemically almost identical phases in the HDPE/COC blends in Figure 2a.…”
mentioning
confidence: 99%