2018
DOI: 10.1016/j.apsusc.2018.06.280
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Selective etching of PDMS: Etching technique for application as a positive tone resist

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Cited by 9 publications
(2 citation statements)
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“…In areas with absence of photoresist, the glass surface is eroded, thereby generating the microchannel. Finally, the microchannel is sealed with a layer of PDMS [54]. Figure 7A shows a schematic of the etching process.…”
Section: Enzymatic Biosensors Applied To Microfluidic Systemsmentioning
confidence: 99%
“…In areas with absence of photoresist, the glass surface is eroded, thereby generating the microchannel. Finally, the microchannel is sealed with a layer of PDMS [54]. Figure 7A shows a schematic of the etching process.…”
Section: Enzymatic Biosensors Applied To Microfluidic Systemsmentioning
confidence: 99%
“…Meanwhile, viscoelastic substrate and sacrificial polymer etching could produce various micro/nanostructures for special applications. Szilasi et al conducted an in-depth study of the selective etching of polydimethylsiloxane (PDMS) using potassium hydroxide and sodium hydroxide [28]. Liu et al used soft lithography to obtain PDMS with a rectangular channel as the top layer of the device [29].…”
Section: Introductionmentioning
confidence: 99%