Selective growth of InAs quantum dots on patterned Si/SiO/sub 2/ substrates

Choi, Byoung Geol; Park, C.M.; Song, Shuyan; Hwang, Sunghwan; Min, Byungdon; Son, M. H.; Ahn, Dae‐Hwan; Park, Y.J.; Kim, E.K.; Min, Seok-Ki

doi:10.1109/imnc.2000.872688

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE

DOI: 10.1109/imnc.2000.872688

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Selective growth of InAs quantum dots on patterned Si/SiO/sub 2/ substrates

Byoung Geol Choi

C.M. Park²,

Shuyan Song³

et al.

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Selective growth of InAs quantum dots on patterned Si/SiO/sub 2/ substrates

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