The yields for the production of H(D) atoms in the reactions of Xe(6s[3/2]1) with simple hydrocarbons and their deuterated variants were determined. Xe(6s[32](1)) was produced by two-photon laser excitation of Xe(6p[1/2]0) followed by concomitant amplified spontaneous emission. H(D) atoms are detected using a vacuum-ultraviolet laser-induced fluorescence (LIF) technique. The H(D)-atom yields were evaluated from the LIF intensities and the overall rate constants for the quenching, which were determined from the temporal profile measurements of the resonance fluorescence from Xe(6s[3/2](1)). HD isotope effects were observed not only in the overall rate constants but also in the H(D)-atom yields. The yields for CH4, C2H4, and C2H2 were determined to be 0.89, 1.43, 1.03, respectively, while those for CD4, C2D4, and C2D2 were found to be smaller; 0.63, 0.86, and 0.79, respectively. The HD yield ratio for CH2D2 was 1.76. The presence of the isotope effects both in the rate constants and the yields suggests that electronic-to-electronic energy transfer processes and abstractive processes are competing.