2017
DOI: 10.1002/admt.201700018
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Selective Surface Smoothening of Polymer Microlenses by Depth Confined Softening

Abstract: A surface selective smoothening of thermoplastic polymer is established while maintaining the high curvature corners required for a 50 µm tall, refractive, optical diffuser device. 172 nm exposure provides selective modification of a 400 nm thick surface skin layer in 3D master structures, which allows smoothening RMS roughness from 22 nm down to below 10 nm by thermal reflow.

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Cited by 34 publications
(29 citation statements)
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“…Such polymer substrates are poly(ethylene)terephthalate (PET) and polyethylene naphthalate (PEN), which would melt in too high temperatures and the structures on them would be distorted. By using poly(methyl methacrylate) (PMMA) with lower T g as a substrate (or as a planarization layer on other material substrates), we can apply a heating step to eliminate the sharp Λ‐ridges and grooves, and achieve a flat surface between the lines . Flash lamp annealing (FLA) is presented as an option for both ink sintering and thermal reflow, which enables to reduce both the temperature and exposure time .…”
Section: Introductionmentioning
confidence: 99%
“…Such polymer substrates are poly(ethylene)terephthalate (PET) and polyethylene naphthalate (PEN), which would melt in too high temperatures and the structures on them would be distorted. By using poly(methyl methacrylate) (PMMA) with lower T g as a substrate (or as a planarization layer on other material substrates), we can apply a heating step to eliminate the sharp Λ‐ridges and grooves, and achieve a flat surface between the lines . Flash lamp annealing (FLA) is presented as an option for both ink sintering and thermal reflow, which enables to reduce both the temperature and exposure time .…”
Section: Introductionmentioning
confidence: 99%
“…f) Current 3D‐printing processes to achieve smooth surface quality. I) Reproduced with permission . Copyright 2017, SPIE.…”
Section: D Printing Of Bioinspired Optical Devicesmentioning
confidence: 99%
“…To create prototype of optical lenses and devices, traditional fabrication methods are limited by their high cost, time‐consuming, and difficulties in modifying designs. Besides, the postprocessing steps such as sanding, polishing, bead blasting, or vapor smoothing may change the structural details or the overall shape, especially for microscale complex optical structures . 3D printing may provide breakthroughs for the fabrication of smooth optical surfaces (Figure f).…”
Section: D Printing Of Bioinspired Optical Devicesmentioning
confidence: 99%
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“…It can be operated in ambient, and large area lamps enabling homogeneous irradiation are available. More details will be presented in future publications [20]. Ambient conditions Figure 2.…”
Section: Layering Versus Post-processing For Roughness Reductionmentioning
confidence: 99%