2022
DOI: 10.1364/oe.471681
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Self-adjusting inverse design method for nanophotonic devices

Abstract: Nanophotonic devices, which consist of multiple cell structures of the same size, are easy to manufacture. To avoid the optical proximity effect in the ultraviolet lithography process, the cell structures must be maintained at a distance from one another. In the inverse design process, the distance is maintained by limiting the optimized range of the location. However, this implementation can weaken the performance of the devices designed during transmission. To solve this problem, a self-adjusting inverse des… Show more

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Cited by 2 publications
(1 citation statement)
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“…As an effective numerical simulation method, the FDFD method is widely used in various fields such as micro/nano photonic device design [1][2][3] and geophysical exploration [4][5] . The method is based on the Yee grid theory to discretize the field components in space.…”
Section: Introductionmentioning
confidence: 99%
“…As an effective numerical simulation method, the FDFD method is widely used in various fields such as micro/nano photonic device design [1][2][3] and geophysical exploration [4][5] . The method is based on the Yee grid theory to discretize the field components in space.…”
Section: Introductionmentioning
confidence: 99%