Abstract:In this article, we present an overview of aperture and apertureless type scanning near-field optical microscopy (SNOM) techniques that have been developed, with a focus on three-dimensional (3D) SNOM methods. 3D SNOM has been undertaken to image the local distribution (within~100 nm of the surface) of the electromagnetic radiation scattered by random and deterministic arrays of metal nanostructures or photonic crystal waveguides. Individual metal nanoparticles and metal nanoparticle arrays exhibit unique effects under light illumination, including plasmon resonance and waveguiding properties, which can be directly investigated using 3D-SNOM. In the second part of this article, we will review a few applications in which 3D-SNOM has proven to be useful for designing and understanding specific nano-optoelectronic structures. Examples include the analysis of the nano-optical response phonetic crystal waveguides, aperture antennae and metal nanoparticle arrays, as well as the design of plasmonic solar cells incorporating random arrays of copper nanoparticles as an optical absorption enhancement layer, and the use of 3D-SNOM to probe multiple components of the electric and magnetic near-fields without requiring specially designed probe tips. A common denominator of these examples is the added value provided by 3D-SNOM in predicting the properties-performance relationship of nanostructured systems.