Self-assembled polymer MEMS sensors and actuators

In this paper, RuO2-CB/MVQ composites were prepared through following steps. First, the nanoruthenium particles had been prepared by solvent thermo-deoxidization ways. Secondly, the nanoRuO2 particles had been formed by oxidation reaction of nanoruthenium particles in air. Thirdly, the carbon black/silicone rubber mixed rubber was prepared by solvent mixing. Fourthly, the nanoruthenium particles were mixed into carbon black/silicone rubber mixed rubber by rubbing dispersion. Finally, vulcanization molding was carried out at certain preasure and temperature. The piezoresistive properties of CB/MWQ composite materials were tested with pressure-resistance testing systems designed ourselves. The test results showed that suitable amounts of RuO2 could enhance the stability and creep of piezoresistive properties of CB/MWQ composite materials. The microstructure of CB/MWQ composite materials were analyzed with SEM and TEM. The characterization results showed that nanoRuO2 particles dispersed in composite materials in nanolevel. These nanostructure could improve conductive net of carbon black, and reinforce crosslink net of silicone rubber. These factors had advantage to the stability of piezoresistive properties of CB/MWQ composite materials.

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Effect of RuO<sub>2</sub> on Piezoresistive Properties of CB/MVQ Composite Materials

Fan

Huang

et al. 2014

KEM

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Self-assembled polymer MEMS sensors and actuators

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Effect of RuO<sub>2</sub> on Piezoresistive Properties of CB/MVQ Composite Materials

Effect of RuO<sub>2</sub> on Piezoresistive Properties of CB/MVQ Composite Materials

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