Abstract:Block copolymer (BCP) lithography is one of the most technologically intriguing and scientifically interesting strategies for achieving nanometer‐sized features. This method usually exploits toluene as solvent for the deposition of BCPs in all the processing steps. However, this chemical has some technical disadvantages, such as high toxicity and hygroscopicity. The first aspect can limit its use on the industrial scale because of the protocols on the environmental and operator risks, while the second causes a… Show more
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