2018
DOI: 10.1016/j.actamat.2018.08.055
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Self-assembly of TaC@Ta core–shell-like nanocomposite film via solid-state dewetting: Toward superior wear and corrosion resistance

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Cited by 44 publications
(24 citation statements)
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“…It has gained significant research impetus due to its both destructive nature raising concerns over the reliability of thin films [7][8][9][10] and constructive nature that can be utilized for creating micro-and nano-sized patterns that are extremely difficult to produce using standard micro-and nano-fabrication processes [11][12][13][14]. In particular, the features formed by the dewetting of thin metallic films find applications in myriad fields, such as microelectronic devices, photovoltaic cells, sensors, micro-electro-mechanical systems, etc [15][16][17][18][19]. Herein, the features must remain stable during the process integration as well as the regular operation of the system, which may be subjected to thermal cycling, isothermal heating (as during annealing treatment), etc.…”
Section: Introductionmentioning
confidence: 99%
“…It has gained significant research impetus due to its both destructive nature raising concerns over the reliability of thin films [7][8][9][10] and constructive nature that can be utilized for creating micro-and nano-sized patterns that are extremely difficult to produce using standard micro-and nano-fabrication processes [11][12][13][14]. In particular, the features formed by the dewetting of thin metallic films find applications in myriad fields, such as microelectronic devices, photovoltaic cells, sensors, micro-electro-mechanical systems, etc [15][16][17][18][19]. Herein, the features must remain stable during the process integration as well as the regular operation of the system, which may be subjected to thermal cycling, isothermal heating (as during annealing treatment), etc.…”
Section: Introductionmentioning
confidence: 99%
“…The constructive usage of solid-state dewetting is not limited to the electronics, as it has also been used for processing composites for structural applications. Recently, Ren et al reported that dewetting-induced nano-particularization of TaC inside shells of Ta in a TaC–Ta composite had superior hardness, toughness, wear, and corrosion resistance, as compared to the traditional composite, that is, the composite formed without the dewetting process route. Nevertheless, as a continuous thin film fragments through a dewetting process (void nucleation and growth), this phenomenon is also a major reliability concern in numerous micro- and nanoscale devices and appliances, such as reflectors, microelectronics, sensors, and so forth, that have several components made of very thin metal films. , Based on this short description, it is imperative to study dewetting of thin films.…”
Section: Introductionmentioning
confidence: 99%
“…However, no tissue phase was found in the crystal structure of Ta 3 ZrB 8 solid solution. Another possible source of structural toughening is phase transformation during indentation, which dissipates a large amount of deformation energy and deflects or even stops the crack propagation [ 32 ]. However, the results in Fig.…”
Section: Resultsmentioning
confidence: 99%