2013
DOI: 10.1021/la4023745
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Self-Cleaning Poly(dimethylsiloxane) Film with Functional Micro/Nano Hierarchical Structures

Abstract: This paper reports a novel single-step wafer-level fabrication of superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) films. The MNDS PDMS films were replicated directly from an ultralow-surface-energy silicon substrate at high temperature without any surfactant coating, achieving high precision. An improved deep reactive ion etching (DRIE) process with enhanced passivation steps was proposed to easily realize the ultralow-surface-energy MNDS silicon substrate and also utilized as a pos… Show more

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Cited by 50 publications
(29 citation statements)
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“…Furthermore, because the PET film, PVDF film, electrode, and PDMS film are hydrophobic, the self‐powered sensor is able to continue working properly after experiencing a moist environment. The stability of the self‐powered sensor after exposure to extreme moisture conditions was tested (Figure S6, Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…Furthermore, because the PET film, PVDF film, electrode, and PDMS film are hydrophobic, the self‐powered sensor is able to continue working properly after experiencing a moist environment. The stability of the self‐powered sensor after exposure to extreme moisture conditions was tested (Figure S6, Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…Superhydrophobic surfaces with a water contact angle (CA) higher than 150° and a sliding angle (SA) lower than 10°, which exist in nature (e.g., lotus leaves and butterfly wings), have a wide application in self‐cleaning, water‐proofing, anti‐icing, and anticorrosion . The water repellency of such surfaces often depends on low‐surface‐energy components and proper roughness created by micro and nanoscale structures .…”
Section: Introductionmentioning
confidence: 99%
“…In the past decades, great efforts have been made to construct various elaborate roughness by bionic methods for the fabrication of superhydrophobic surfaces . However, these surface structures are usually fragile and are easily damaged by mechanical loads (e.g., abrasion and water washing) and consequently lose their superhydrophobic characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…All of these drawbacks limit the practical application of this method in specific occasions that require high transparency and other materials. Alternatively, replica molding (REM) is an efficient and simple method for the duplication of the information (that is, shape, morphology, and structure) present in the surface of a mold 23,24 . The wrinkle-fabrication process can be further simplified and the cost can be reduced by using a fabricated wrinkle mold to duplicate a wrinkle pattern via REM.…”
Section: Introductionmentioning
confidence: 99%