Self-conditioning performance of hydrophilic fixed abrasive pad

Zheng, Fangzhi; Zhu, Ning; Zhu, Yongwei; Li, Xinlu; Li, Jun; Zuo, Dunwen

doi:10.1007/s00170-016-9553-9

Cited by 13 publications

(3 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…With the increasing of interfacial normal load, the hardening phenomenon is more obvious. This was because the pores of FAP surface were accumulated by debris during CMP process, and the surface density of FAP is increased, which resulted in an increase in the surface hardness of FAP (Zheng et al , 2017).…”

Section: Resultsmentioning

confidence: 99%

“…It was demonstrated that the materials blocking the surface pores of FAP are wear debris of polishing pad and quartz glass powder (Li et al , 2017;Li et al , 2014;Tang et al , 2020). The debris particles concentration at the contact interface is increased, and the pore on the sample surface is more easily blocked, which results in the low surface roughness value (Lu et al , 2002; Zheng et al , 2017). According to the surface roughness and hardness parameters, the roughness value of glazed FAP is reduced from its original value (Figure 4), and the same changing trend is also occurred for the hardness indenter penetration depth of L (Figure 6).…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tian,

Wu,

Pang

et al. 2023

ILT

View full text Add to dashboard Cite

Purpose This study aims to clarify the influence mechanism of polishing solution type on the glazing evolution of fixed abrasive pad under different interfacial pressure conditions. Design/methodology/approach The tribological experiments were carried out on the friction and wear machinery with W3-5 diamond fixed abrasive pad and quartz glass workpiece under three polishing solution types of five pressure conditions. The changes of surface morphology, porosity and hardness of fixed abrasive pad were detected by white light interferometer, optical microscope and shore hardness tester. Findings The results showed that the glazed phenomenon of fixed abrasive pad is occurred after a certain time, which is more obvious with the increasing of interfacial pressures. The polishing solution type has a significant effect on the glazing time, although the glazed phenomenon is inevitable. The mechanism of it is that the micro-convex peaks on the surface of the fixed abrasive pad are easily wear, and the pores are blocked by the accumulation of waste debris generated during the experiment process. Thus, a smooth and high-density hard layer is formed on the surface of the fixed abrasive pad which induces the decreasing of the friction coefficient and surface roughness value. For selected polishing solution types, the wear rate of micro-convex peaks is different due to the corrosion action difference with polishing pad surface. Originality/value The main contribution of this work is to provide a new investigating method for further understanding the glazing evolution mechanism of fixed abrasive pad. Peer review The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-08-2023-0257/

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tian,

Wu,

Pang

et al. 2023

ILT

View full text Add to dashboard Cite

show abstract

“…Among them, lapping is a key process between cutting and polishing. Its main function is to remove the cutting marks from the surface of the cutting sheet rapidly, improve the flatness of the workpiece, and the uniformity of the workpiece surface in preparation for subsequent polishing processing; however, the thickness of the sub-surface damaged layer of the workpiece after lapping greatly affects the subsequent polishing time and polishing quality [8,9]. How to obtain a sapphire lapping piece with a high surface quality in an efficient manner is a difficult problem facing engineers responsible for such processing operations.…”

Section: Introductionmentioning

confidence: 99%

Processing performance of vitrified bonded fixed-abrasive lapping plates for sapphire wafers

Xiong

Nie²,

Lu³

et al. 2022

Int J Adv Manuf Technol

View full text Add to dashboard Cite

To enhance the lapping effects of sapphire wafers, two vitrified bonded fixed-abrasive lapping plates with different mechanical properties were developed and used to lap sapphire wafers to evaluate the effects of lapping time and dressing cycle on the lapping process effect and the stability of the lapping plates. The results indicate that the lapping material removal rate (MRR) and surface roughness (Ra) of the workpiece decrease with increasing lapping time; the higher the hardness of the lapping plate, the larger the MRR and Ra. There are differences in the primary wear forms between the two types of plates, with the high-hardness plate being mainly abrasive wear and abrasive breakage, while the low-hardness plate being mainly abrasive peeling off and abrasive wear. The two plates have the same trend in material removal for sapphire wafers -increasing the lapping time, the MRR is found to be gradually decreased and plateaued after 30 min, which is only about 20% of that of the initial lapping time, resulting in the plates needing to be dressed. After dressing the lapping plates, the plate processing performance returns to its initial state; the MRR deviation is less than 10% within the same period of use after several dressings.

show abstract

Effect of ethylenediamine on the surface glazed phenomenon of fixed abrasive pad under deionized water condition

Pang

Wang

et al. 2023

Int J Adv Manuf Technol

View full text Add to dashboard Cite

Self-conditioning performance of hydrophilic fixed abrasive pad

Cited by 13 publications

References 12 publications

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Processing performance of vitrified bonded fixed-abrasive lapping plates for sapphire wafers

Effect of ethylenediamine on the surface glazed phenomenon of fixed abrasive pad under deionized water condition

Contact Info

Product

Resources

About