Self-consistent model of an inductive RF plasma source in an external magnetic field

Aleksandrov, A. F.; Bugrov, G.E.; Вавилин, К. В.; Kerimova, I. F.; Kondranin, S.G.; Kralkina, E.A.; Pavlov, V.B.; Plaksin, Vadim Yu.; Rukhadze, A. A.

doi:10.1134/1.1744949

Cited by 20 publications

(26 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Numerical simulations performed generally in the framework of the hydrodynamic model of a low-pressure RF inductive plasma source confirmed the above conclusions [41,45] about the mechanism of RF-power absorption by the plasma. Figure 5a shows the typical dependences of R pl on the magnitude of the magnetic field in the helicon domain, which were calculated for an argon pressure of 1 mTorr and different values of the plasma density.…”

Section: Inductive Discharge With An External Magnetic Fieldsupporting

confidence: 62%

“…In these experiments, use was made of plasma sources equipped with helical antennas located on their lateral and end surfaces, as well as with Nagoya III antennas. For an operating frequency of 13.56 MHz, the magnetic field intensity range B % 0X4À1 mT corresponds to ECR conditions, and the range B b 1 mT to the conditions of helicon and Trivelpiece ± Gold wave excitation [41,44].…”

Section: Measuring Techniquesmentioning

confidence: 99%

“…By and large, the increase in collision frequency caused by an increase in the gas pressure or a rise in electron ± ion collision frequency with plasma density has the effect that the dependence of electric field amplitudes on the magnetic field induction smooths out. Furthermore, the TG-wave amplitude lowers with increasing collision frequency and the bulk wave turns into a surface wave [41]. For this reason, the equivalent plasma resistance lowers.…”

Section: May 2008mentioning

confidence: 99%

“…Below, we consider the results of experiments staged with the aim of revealing these properties [46] and the data of numerical discharge simulation, which elucidate the physics of the observed effects. A self-consistent model of the RF inductive source was outlined in Refs [41,46]. The results given below were obtained assuming a linear dependence of the electron concentration on the power deposited into the plasma [41,46]:…”

Section: May 2008mentioning

confidence: 99%

See 3 more Smart Citations

Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Kralkina¹

2008

Phys.-Usp.

View full text Add to dashboard Cite

Plasma reactors and ion sources whose operation relies on a low-pressure radio-frequency (RF) inductive discharge have been an important constituent of modern ground and space technologies for several decades already. However, the steadily toughening and varying requirements of plasma technologies call for improving the old models of devices and developing novel prospective models. Of vital importance in the development of inductive plasma sources is the provision of conditions whereat the plasma efficiently absorbs the RF power. In recent years it has become evident that in a lowpressure RF inductive discharge the RF-generator power is distributed between the active resistance of the external circuit and the plasma. In the latter case, the power is delivered to the plasma via two channels: an inductive channel, which exists due to the current flowing through an inductor or an antenna, and a capacitive one, which is due to the antenna ± plasma capacitive coupling. RF inductive discharge properties related to the RFpower redistribution between the channels are considered and the mechanisms of RF-power absorption are analyzed. The feasibilities of optimizing RF inductive plasma sources are also discussed. E A Kral'kina

show abstract

Section: Inductive Discharge With An External Magnetic Fieldsupporting

confidence: 62%

Section: Measuring Techniquesmentioning

confidence: 99%

Section: May 2008mentioning

confidence: 99%

Section: May 2008mentioning

confidence: 99%

See 2 more Smart Citations

Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Kralkina¹

2008

Phys.-Usp.

View full text Add to dashboard Cite

show abstract

“…The features of electrodynamics of nonuniform plasma waveguides in a magnetic field remain topical and interesting for researchers dealing with high-power plasma electronics [1], helicon discharges [2,3], the active action on the ionospheric plasma [4,5], and physics of electromagnetic sources in inhomogeneous plasmas [3,6,7]. For example, a discussion of the role of plasma waves [8,9] in helicon discharges is still underway.…”

Section: Introductionmentioning

confidence: 99%

Dispersion properties and field structures of eigenmodes of nonuniform plasma waveguides in a longitudinal magnetic field

Vdovichenko

Марков

2006

Radiophys Quantum Electron

View full text Add to dashboard Cite

We study the field structure and dispersion properties of a hybrid eigenmode guided by a nonuniform magnetized plasma waveguide. It is shown that the rotational and quasi-potential waves contribute to the formation of such a mode in the whistler frequency range. Depending on the plasma density, the rotational component of the hybrid mode is determined by either waves with complex transverse wave numbers or whistler waves, or by true surface waves. In the presence of an axial nonuniformity of the plasma in a channel, the transverse field structure of the propagating mode changes, which is stipulated by changes in both the values of transverse wave numbers and their dependence on the radial coordinate. It is found that the spectrum of axial wave numbers of eigenmodes of a plasma waveguide undergoes a pronounced condensation when smoothing the waveguide walls. The damping of the hybrid mode of a nonuniform waveguide due to electron collisions is found and it is shown that collisional losses determine the damping of waves trapped in the waveguide in the experiments on ionization self-channeling of whistler waves. We have found the effect of "displacing" the strong field from the inner core to the background outer region of the waveguide with increasing plasma density on its axis and broadening background region.

show abstract

10.1007/s11452-008-3009-x

2010

CrossRef Listing of Deleted DOIs

View full text Add to dashboard Cite

The stimulated scattering of a whistler wave beam forming an extended discharge channel in a magnetic mirror trap is discovered and investigated experimentally. It is shown that the beam is scattered by relaxation oscillations of the lattice of plasma inhomogeneities excited by the beam field. The spectrum of the pump field in the RF discharge plasma is found to broaden considerably and to contain individual modulation peaks corresponding to lattice oscillations. The peaks are observed at working gas pressures at which the electron mean free path is close to the wavelength of the standing wave forming the discharge channel. A physical model describing the phenomena observed is developed. PACS numbers: 52.35.Mw

show abstract

Self-consistent model of an inductive RF plasma source in an external magnetic field

Cited by 20 publications

References 10 publications

Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Dispersion properties and field structures of eigenmodes of nonuniform plasma waveguides in a longitudinal magnetic field

10.1007/s11452-008-3009-x

Contact Info

Product

Resources

About