Self-organizational tendencies of heteroepitaxial transition-metal silicide nanoislands

Morphological and electrical properties of self-assembled iron silicide nanoparticles on Si(0 0 1) and Si(1 1 1) substrates

“…The silicide, as a reaction product, might be grown epitaxially on the Si substrate if the misfit is low enough. Numerous examples of silicide layers are known, which can be grown epitaxially on silicon substrates [10]. Generally, the deposited metal film structure and the solid phase reaction affect the quality of the silicide epitaxial growth.…”