2015
DOI: 10.1002/pssb.201451508
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Self‐organized growth of catalyst‐free GaN nano‐ and micro‐rods on Si(111) substrates by MOCVD

Abstract: Our study shows the impact of the process parameters: predose before AlN buffer deposition, SiNx deposition time, GaN growth temperature and silane injection time on growth and morphology of GaN nanowires (NWs) formed by a self‐organized mechanism on a silicon substrate. We determined a process parameter window for successful GaN NW growth and show how the variation of studied parameters changes the NW morphology and density. The optimization of these process parameters led to high‐density straight GaN NWs, al… Show more

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Cited by 6 publications
(6 citation statements)
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“…A standard example of an antisurfactant used in epitaxy is silicon in MOCVD growth of group‐III nitride nanostructures. [ 35 ] It has been widely studied that Si presence during the process leads to a transition from 2D to 3D growth, enabling the growth of (Al, Ga, and In) N quantum dots, [ 36–38 ] nanowires, [ 39–41 ] and microrods. [ 42,43 ]…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…A standard example of an antisurfactant used in epitaxy is silicon in MOCVD growth of group‐III nitride nanostructures. [ 35 ] It has been widely studied that Si presence during the process leads to a transition from 2D to 3D growth, enabling the growth of (Al, Ga, and In) N quantum dots, [ 36–38 ] nanowires, [ 39–41 ] and microrods. [ 42,43 ]…”
Section: Introductionmentioning
confidence: 99%
“…A standard example of an antisurfactant used in epitaxy is silicon in MOCVD growth of group-III nitride nanostructures. [35] It has been widely studied that Si presence during the process leads to a transition from 2D to 3D growth, enabling the growth of (Al, Ga, and In) N quantum dots, [36][37][38] nanowires, [39][40][41] and microrods. [42,43] Regardless of the growth method, wurtzite nanowires and microrods exhibit a hexagonal shape with smooth m-plane sidewall facets or, rarely, a triangular shape.…”
Section: Introductionmentioning
confidence: 99%
“…The coarsening of these clusters results in the nanorod's nuclei formation and kinetics determine the elongation and final nanorod growth. [43,56] The general rule is that nanorods grow in the direction of minimizing the total surface energy of the crystal. [57] III-nitride nanorods usually grow preferentially along c-axis, since the average surface energies of the polar and semipolar planes are higher than those of nonpolar planes.…”
Section: Catalyst-assisted Growthmentioning
confidence: 99%
“…The coarsening of these clusters results in the nanorods nuclei formation and kinetics determine the elongation and final nanorod growth. [35,47] The general rule is that nanorods grow in the direction of minimizing the total surface energy of the crystal. [48] III-nitride nanorods, usually grow preferentially along c-axis, since the average surface energies of the polar and semipolar planes are higher than those of nonpolar planes.…”
Section: Catalyst-assisted Growthmentioning
confidence: 99%