Self-organized nanoscale multilayer growth in hyperthermal ion deposition

Gerhards, I.; Stillrich, Holger; Ronning, Carsten; Hofsäß, H.; Seibt, M.

doi:10.1103/physrevb.70.245418

Cited by 35 publications

(58 citation statements)

References 38 publications

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“…This is in accordance with results reported in the literature. 25,33 The layers consist of individual carbidic nickel nanoparticles in a carbon matrix. The undulations of Ni concentrations within each layer are correlated with the Ni distribution in adjacent layers, indicating that nanoparticle nucleation is dependent on the morphology of the underlying layer.…”

Section: Resultsmentioning

confidence: 99%

“…[24][25][26][27] Incoming energetic ions induce atomic displacements along their path due to collisions. 28,29 This results in collision-induced random walks of atoms in the near surface layer defined by the ion range.…”

Section: Introductionmentioning

confidence: 99%

“…28,29 This results in collision-induced random walks of atoms in the near surface layer defined by the ion range. 25 A constant supply of ions results in a steady-state movement of the surface. The phase separation kinetics is confined to the moving surface layer, leaving the precipitation patterns "frozen" in the bulk.…”

Section: Introductionmentioning

confidence: 99%

“…The depth of this "active" layer may be adjusted by changing the ion energies and masses, providing external control of the pattern periodicity. 25,27 In this study, the phase separation during the C:Ni film growth under energetic physical vapor deposition ͑PVD͒ conditions is studied. Although the two elements form a metastable Ni 3 C, 30,31 excess carbon is quickly expelled from the carbide phase.…”

Section: Introductionmentioning

confidence: 99%

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Nanoscale precipitation patterns in carbon–nickel nanocomposite thin films: Period and tilt control via ion energy and deposition angle

Abrasonis

Oates

Kovács

et al. 2010

Journal of Applied Physics

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Periodic precipitation patterns in C:Ni nanocomposites grown by energetic ion codeposition are investigated. Films were grown at room temperature by ionized physical vapor deposition using a pulsed filtered cathodic vacuum arc. We reveal the role of the film composition, ion energy and incidence angle on the film morphology using transmission electron microscopy and grazing incidence small angle x-ray scattering. Under these growth conditions, phase separation occurs in a thin surface layer which has a high atomic mobility due to energetic ion impacts. This layer is an advancing reaction front, which switches to an oscillatory mode, producing periodic precipitation patterns. Our results show that the ion induced atomic mobility is not random, as it would be in the case of thermal diffusion but conserves to a large extent the initial direction of the incoming ions. This results in a tilted pattern under oblique ion incidence. A dependence of the nanopattern periodicity and tilt on the growth parameters is established and pattern morphology control via ion velocity is demonstrated.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Nanoscale precipitation patterns in carbon–nickel nanocomposite thin films: Period and tilt control via ion energy and deposition angle

Abrasonis

Oates

Kovács

et al. 2010

Journal of Applied Physics

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“…Ion induced phase separation is an essential process for the multilayer formation of ion beam deposited metal carbon nanocomposite films [27][28][29]. Ion-induced phase separation has been observed as volume effect, e.g., in binary metal alloys [30][31][32] and was attributed to metal nanocrystal formation at Si/SiO 2 interfaces [33], in Pt/C layered films [34], ion irradiated C/Cr coatings [35], and ion irradiated GeO x films [36].…”

Section: Introductionmentioning

confidence: 99%

The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

et al. 2012

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We investigate the ripple pattern formation on Si surfaces at room temperature during normal incidence ion beam erosion under simultaneous deposition of different metallic co-deposited surfactant atoms. The co-deposition of small amounts of metallic atoms, in particular Fe and Mo, is known to have a tremendous impact on the evolution of nanoscale surface patterns on Si. In previous work on ion erosion of Si during co-deposition of Fe atoms, we proposed that chemical interactions between Fe and Si atoms of the steady-state mixed Fe x Si surface layer formed during ion beam erosion is a dominant driving force for self-organized pattern formation. In particular, we provided experimental evidence for the formation of amorphous iron disilicide. To confirm and generalize such chemical effects on the pattern formation, in particular the tendency for phase separation, we have now irradiated Si surfaces with normal incidence 5 keV Xe ions under simultaneous gracing incidence co-deposition of Fe, Ni, Cu, Mo, W, Pt, and Au surfactant atoms. The selected metals in the two groups (Fe, Ni, Cu) and (W, Pt, Au) are very similar regarding their collision cascade behavior, but strongly differ regarding their tendency to silicide formation. We find pronounced ripple pattern formation only for those co deposited metals (Fe, Mo, Ni, W, and Pt), which are prone to the formation of mono and disilicides. In contrast, for Cu and Au co-deposition the surface remains very flat, even after irradiation at high ion fluence. Because of the very different behavior of Cu compared to Fe, Ni and Au compared to W, Pt, phase separation toward amorphous metal silicide phases is seen as the relevant pro-

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Effect of the metal concentration on the structural, mechanical and tribological properties of self-organized a-C:Cu hard nanocomposite coatings

Pardo

Buijnsters

Endrino

et al. 2013

Applied Surface Science

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174 GPa for the film with a Cu content of 28 at.%. In parallel, a 50% drop in the nanohardness from about 28 GPa towards 14 GPa is observed for these coatings. An increase in the Cu content also produces an increment of the coefficient of friction in reciprocating sliding tests performed against a corundum ball counterbody. As compared to the metal free film, a nearly four times higher coefficient of friction value is detected in the case of a Cu content of 28 at.%. Nevertheless, the carbon-copper composite coatings produced a clear surface protection of the substrate evidenced by a reduced wear loss for Cu contents below 5 at.%.

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Self-organized nanoscale multilayer growth in hyperthermal ion deposition

Cited by 35 publications

References 38 publications

Nanoscale precipitation patterns in carbon–nickel nanocomposite thin films: Period and tilt control via ion energy and deposition angle

Nanoscale precipitation patterns in carbon–nickel nanocomposite thin films: Period and tilt control via ion energy and deposition angle

The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

Effect of the metal concentration on the structural, mechanical and tribological properties of self-organized a-C:Cu hard nanocomposite coatings

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