Self-organized near-field etching of the sidewalls of glass corrugations

Yatsui, Takashi; Hirata, Kazuya; Tabata, Yoichiro; Miyake, Y.; Akita, Yasuyuki; Yoshimoto, Mamoru; Nomura, Wataru; Kawazoe, Tadashi; Naruse, Makoto; Ohtsu, Motoichi

doi:10.1007/s00340-011-4569-1

Cited by 19 publications

(6 citation statements)

References 11 publications

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“…We obtained the minimum R a of diamond to be as small as 0.096 nm: similar R a reduction was observed for both Ib and IIa diamond substrates . Furthermore, because this technique is a non‐contact method DPP etching can be applied to not only flat substrates but also three‐dimensional substrates .…”

Section: Dressed‐photon–phonon Etchingsupporting

confidence: 69%

Polarization‐controlled dressed‐photon–phonon etching of patterned diamond structures

Yatsui

Takeuchi

Koizumi

et al. 2014

Physica Status Solidi (a)

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To realize an ultra-flat diamond surface with a threedimensional (3D) structure, we performed dressed-photonphonon (DPP) etching. A DPP is generated on nano-scale protrusions. Hence, the generation of DPPs results in selective removal of nano-scale protrusions, thereby achieving an ultra-flat surface even on the sidewall of a diamond mesa structure. By controlling the polarization of the incident light, a smooth diamond mesa structure sidewall was obtained, and a higher etching rate was obtained with a perpendicular polarization on the corrugations. In addition, by selective deposition of n-layer diamond on the p-layer diamond mesa structure, smooth n-layer diamond was confirmed on the DPP etched sidewall. (a) (b) DPP p-layer p-layer n-layer n-layer 1 µm 1 µm (c) (d) Schematic of dressed-photon-phonon (DPP) etching on the sidewall: (a) before and (b) after etching, in which DPP selectively generates on the corrugations and etching automatically stops when the surface was smooth. Scanning electron microscopy image of the selective deposition of the n-layer (c) without and (d) with the DPP etched sidewall.

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Section: Dressed‐photon–phonon Etchingsupporting

confidence: 69%

Polarization‐controlled dressed‐photon–phonon etching of patterned diamond structures

Yatsui

Takeuchi

Koizumi

et al. 2014

Physica Status Solidi (a)

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“…4 ). In particular, the side walls of diffraction grating corrugations in soda lime glass were polished by using DPP etching [ 41 ]. Consequently, the R a values decreased for both the substrate and the grooved surface, and an additional reduction in the line edge roughness was observed.…”

Section: Reviewmentioning

confidence: 99%

Challenges in realizing ultraflat materials surfaces

Yatsui¹,

Nomura²,

Stehlin³

et al. 2013

Beilstein J. Nanotechnol.

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SummaryUltraflat surface substrates are required to achieve an optimal performance of future optical, electronic, or optoelectronic devices for various applications, because such surfaces reduce the scattering loss of photons, electrons, or both at the surfaces and interfaces. In this paper, we review recent progress toward the realization of ultraflat materials surfaces. First, we review the development of surface-flattening techniques. Second, we briefly review the dressed photon–phonon (DPP), a nanometric quasiparticle that describes the coupled state of a photon, an electron, and a multimode-coherent phonon. Then, we review several recent developments based on DPP-photochemical etching and desorption processes, which have resulted in angstrom-scale flat surfaces. To confirm that the superior flatness of these surfaces that originated from the DPP process, we also review a simplified mathematical model that describes the scale-dependent effects of optical near-fields. Finally, we present the future outlook for these technologies.

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“…Since DPs are always created at the tips of the bump on the material surface under light irradiation, the present autonomous etching has been applied to smoothing of a variety of surfaces and materials: the side surface of a diffraction grating [30], the surface of a photomask used for conventional ultraviolet lithography [31], and the surfaces of GaN crystals [32], transparent ceramics [33], and diamonds [34].…”

Section: Technology That Uses Neither Fiber Nor Aperturementioning

confidence: 99%

Perspective on an Emerging Frontier of Nanoscience Opened up by Dressed Photon Studies

Sakuma,

Ojima,

Ohtsu

2023

Nanoarchitectonics

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The core parts of developing dressed photon (DP) research that require advanced knowledge of highly mathematical quantum field theory and their potentially important impacts on the wide spectrum of long-term scientific activities in general, not necessarily restricted to those in the natural science sector, are succinctly explained in this article. Although a considerable number of remarkable technological achievements in the field of nanophotonics have been attained by utilizing DP phenomena, from the theoretical viewpoint, they remain enigmatic, as in the case of dark matter and energy in cosmology. Under such circumstances, an intriguing working hypothesis (WH) for DPs is proposed by the authors of this article through a combination of Ojima’s micro-macro duality theory and the Greenberg-Robinson theorem, claiming that the space-like momentum contribution is an inevitable element for quantum field interactions to occur. Note that, as the Schrödinger’s cat thought experiment clearly shows, the widespread common quantum mechanics knowledge is incapable of explaining how the invisible quantum world is connected to our familiar visible classical world. In the above-mentioned WH, the main reason why we cannot explain either DPs or dark entities in cosmology is shown to have roots in the fact that the prevailing theories have not revealed an important role of spacelike momentum in connecting the quantum and classical worlds. Our new WH further shows that the entire universe is connected by an instantaneous spacelike entropic spin network, as in the case of quantum spin entanglement explained in mainstream physics. Since such a network may have a close relation with the nonlocal consciousness field, which seems to be the final frontier of physics, our perspective on such a possibility is briefly given in the final section of this paper.

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Self-organized near-field etching of the sidewalls of glass corrugations

Cited by 19 publications

References 11 publications

Polarization‐controlled dressed‐photon–phonon etching of patterned diamond structures

Polarization‐controlled dressed‐photon–phonon etching of patterned diamond structures

Challenges in realizing ultraflat materials surfaces

Perspective on an Emerging Frontier of Nanoscience Opened up by Dressed Photon Studies

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