2023
DOI: 10.1016/j.nanoen.2023.108662
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Self-powered transformer intelligent wireless temperature monitoring system based on an ultra-low acceleration piezoelectric vibration energy harvester

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Cited by 17 publications
(3 citation statements)
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“…When designing piezoelectric MEMS energy harvesters, materials like PZT and AlN are considered. Although PZT is often favored for its superior piezoelectric efficiency [38], allowing vibrational energy harvesters to generate power ranging from 1 µW to 100 µW [16][17][18], it poses specific challenges in fabrication due to contamination risks during the deposition process. Conversely, while AlN exhibits lower piezoelectric properties, it is considered more feasible for MEMS fabrication due to its ease of processing [39], typically generating power at mV levels in the nW to µW range [19,20].…”
Section: Harnessing Wind Energy: Correlating Vortex-induced Dynamics ...mentioning
confidence: 99%
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“…When designing piezoelectric MEMS energy harvesters, materials like PZT and AlN are considered. Although PZT is often favored for its superior piezoelectric efficiency [38], allowing vibrational energy harvesters to generate power ranging from 1 µW to 100 µW [16][17][18], it poses specific challenges in fabrication due to contamination risks during the deposition process. Conversely, while AlN exhibits lower piezoelectric properties, it is considered more feasible for MEMS fabrication due to its ease of processing [39], typically generating power at mV levels in the nW to µW range [19,20].…”
Section: Harnessing Wind Energy: Correlating Vortex-induced Dynamics ...mentioning
confidence: 99%
“…The materials commonly chosen for piezoelectric films include PZT and AlN. PZT, known for its high piezoelectric properties, has been applied in MEMS energy harvesters, typically harvesting energy ranging from 1 µW to 100 µW [16][17][18]. However, a significant drawback of PZT is that its use in micromachining processes can contaminate fabrication equipment.…”
Section: Introductionmentioning
confidence: 99%
“…TENGs convert mechanical energy into electrical signals when subjected to external friction, touching, stretching or twisting. TENG enjoys the advantages of simple structure, small size, light weight, high efficiency, high stability and relatively easy preparation, enabling combination with a variety of back-end controls such as wireless signal transmission systems [13], data acquisition and monitoring systems [14], energy storage systems [15], intelligent algorithmic systems [16], etc, and is widely used in fields like electronic skin (e-skin) [17], wearable electronics [18,19], and HMIs [20,21]. In addition to the independent PENGs and TENGs, the hybrid piezoelectric-TENGs (P-TENGs) achieve both triboelectric and piezoelectric effect on a single sensor by sharing common electrodes and transferring charge between PENG and TENG.…”
Section: Introductionmentioning
confidence: 99%