Microwrinkles were formed by treating poly(dimethylsiloxane) (PDMS) surfaces with a mixture of concentrated sulfuric acid and nitric acid at 80 °C followed by a water rinsing step. The acid treatment oxidized the treated area, which also swelled owing to absorption of water during the rinsing step. This absorption of water induced a compressive stress on the PDMS surface that caused the formation of wrinkles. The appearance of wrinkles was controlled by the time interval between the end of the acid treatment and the beginning of the water rinsing step. Wrinkles were formed when the time interval was shorter than 5 s, as water was absorbed by the hygroscopic acid molecules within the treated surface. For longer time intervals of 300 s, this phenomenon was not observed. Based on these findings, a procedure for forming wrinkles in specific areas was developed by hydrating the chosen areas with wet filter paper cut into specific shapes after the acid treatment. The formation of wrinkles was confined to the area under the piece of paper. The orientation and alignment of the wrinkles at the boundaries were also characterized. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2015, 53, 167–174