Eurosensors 2018 2018
DOI: 10.3390/proceedings2130976
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Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

Abstract: We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sus… Show more

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Cited by 2 publications
(1 citation statement)
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“…TPE is widely used in the shoe industry as a shoe sole and adhesive. The development of technologies determines the development and research of new types of TPE products based on polyolefin [4], polybutadiene [5], acrylic acid [6], compositions with hydroxide groups [7], polymer nanocomposites [8].…”
Section: Introductionmentioning
confidence: 99%
“…TPE is widely used in the shoe industry as a shoe sole and adhesive. The development of technologies determines the development and research of new types of TPE products based on polyolefin [4], polybutadiene [5], acrylic acid [6], compositions with hydroxide groups [7], polymer nanocomposites [8].…”
Section: Introductionmentioning
confidence: 99%