SEM analyses of cathodoluminescence in MgO, CdS and GaAs/Ga_xAl_1–xAs crystals

Abstract

SUMMARY The method of analysis developed for the study of cathodoluminescence in the scanning electron microscope is briefly outlined. Current studies of cathodoluminescence in three types of crystal are presented. These are: (1) deformed and annealed MgO, (2) CdS into which Ga has been diffused, and (3) double heterostructure GaAs/GaxAl1–xAs laser material.