Semiconducting behavior of bilayer graphene synthesized by plasma-enhanced chemical vapor deposition and its application in field effect transistors

Zhao, Yu; Park, Chang Soo; Fei, Wei Dong; Lee, Cheol Jin

doi:10.1016/j.matlet.2014.08.028

Cited by 5 publications

(3 citation statements)

References 26 publications

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“…In this work, the activation energy of the bilayer graphene is much lower compared with that of bilayer graphene grown via a PECVD method because of the inclusion of low density of defects in its atomic structure. 45 This observation suggests that a band-like transport dominates the carrier transport in the bilayer graphene, which is further confirmed by a trend of decrease in carrier mobility with increasing temperature (see Figure 4c). Further electrical characterization was performed on a 1.0 cm × 1.0 cm sample size using a typical van der Pauw method under ambient air at 300 K by a Hall effect measurement system.…”

Section: Resultssupporting

confidence: 61%

“…The linear plot at a high-temperature regime, ranging from 250 to 350 K, indicates that thermally activated conduction with an estimated E a of 27.2 meV occurs in the bilayer graphene. In this work, the activation energy of the bilayer graphene is much lower compared with that of bilayer graphene grown via a PECVD method because of the inclusion of low density of defects in its atomic structure . This observation suggests that a band-like transport dominates the carrier transport in the bilayer graphene, which is further confirmed by a trend of decrease in carrier mobility with increasing temperature (see Figure c).…”

Section: Resultsmentioning

confidence: 48%

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Practical Route for the Low-Temperature Growth of Large-Area Bilayer Graphene on Polycrystalline Nickel by Cold-Wall Chemical Vapor Deposition

et al. 2021

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We report a practical chemical vapor deposition (CVD) route to produce bilayer graphene on a polycrystalline Ni film from liquid benzene (C 6 H 6 ) source at a temperature as low as 400 °C in a vertical cold-wall reaction chamber. The low activation energy of C 6 H 6 and the low solubility of carbon in Ni at such a low temperature play a key role in enabling the growth of large-area bilayer graphene in a controlled manner by a Ni surface-mediated reaction. All experiments performed using this method are reproducible with growth capabilities up to an 8 in. wafer-scale substrate. Raman spectra analysis, high-resolution transmission electron microscopy, and selective area electron diffraction studies confirm the growth of Bernal-stacked bilayer graphene with good uniformity over large areas. Electrical characterization studies indicate that the bilayer graphene behaves much like a semiconductor with predominant p-type doping. These findings provide important insights into the wafer-scale fabrication of low-temperature CVD bilayer graphene for next-generation nanoelectronics.

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Section: Resultssupporting

confidence: 61%

Section: Resultsmentioning

confidence: 48%

Practical Route for the Low-Temperature Growth of Large-Area Bilayer Graphene on Polycrystalline Nickel by Cold-Wall Chemical Vapor Deposition

et al. 2021

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“…68 a Schematics of exposure of monolayer graphene suspended on a 5-lm-diameter hole to O 2 plasma and water transport measurements (PG: porous graphene). b Water/salt selectivity as a function of I D /I G ratio showing exceptionally high selectivity for a shorter plasma exposure time (Surwade et al 2015) controlling the defect density and the nano-crystalline size in the process of its PECVD synthesis (Zhao et al 2014). In the second case, a high-density array of nanoscale holes was punched into the monolayer or few-layer graphene as illustrated in Fig.…”

Section: Functionalization Of Graphene By Plasma Engineeringmentioning

confidence: 99%

Nanocarbon materials fabricated using plasmas

Hatakeyama

2017

Rev. Mod. Plasma Phys.

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Since the discovery of fullerenes more than three decades ago, new kinds of nanoscale materials of carbon allotropes called ''nanocarbons'' have so far been discovered or synthesized at successive intervals as cases such as carbon nanotubes, carbon nanohorns, graphene, carbon nanowalls, and a carbon nanobelt, while nanodiamonds were actually discovered before then. Their attractively excellent mechanical, physical, and chemical properties have driven researchers to continuously create one of the hottest frontiers in materials science and technology. While plasma states have often been involved in their discovery, on the other hand, plasma-based approaches to this exciting field originally hold promising and enormous potentials for advancing and expanding industrial/biomedical applications of nanocarbons of great diversity. This article provides an extensive overview on plasma-fabricated nanocarbon materials, where the term ''fabrication'' is defined as synthesis, functionalization, and assembly of devices to cover a wide range of issues associated with the step-by-step plasma processes. Specific attention has been paid to the comparative examination between plasma-based and non-plasma methods for fabricating the nanocarobons with an emphasis on the advantages of plasma processing, such as low-temperature/large-scale fabrication and diversitycarrying structure controllability. The review ends with current challenges and prospects including a ripple effect of the nanocarbon studies on the development of related novel nanomaterials such as transition metal dichalcogenides. It contains not only the latest progress in the field for cutting-edge scientists and engineers, but also the introductory guidance to non-specialists such as lower-class graduate students.& Rikizo Hatakeyama

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Bulk-like phonon transport in multilayer graphene nanostructures with consecutive twist angles

Zhang,

Wang,

Yang

et al. 2024

Surfaces and Interfaces

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Semiconducting behavior of bilayer graphene synthesized by plasma-enhanced chemical vapor deposition and its application in field effect transistors

Cited by 5 publications

References 26 publications

Practical Route for the Low-Temperature Growth of Large-Area Bilayer Graphene on Polycrystalline Nickel by Cold-Wall Chemical Vapor Deposition

Practical Route for the Low-Temperature Growth of Large-Area Bilayer Graphene on Polycrystalline Nickel by Cold-Wall Chemical Vapor Deposition

Nanocarbon materials fabricated using plasmas

Bulk-like phonon transport in multilayer graphene nanostructures with consecutive twist angles

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