Semiconductor Laser Amplifiers as Multifunctional Devices

Weber, H.G.; Großkopf, G.; Ludwig, R.; Schnabel, R.; Schunk, N.

doi:10.1007/978-3-642-45678-7_111

Cited by 1 publication

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“…Much of this work has been carried out in Germany. A summary report on work in progress at the Institute for Microtechnology (IMM) was given in [86]. A number of companies in the UK have started to equip themselves for micromoulding now that industry is requiring mass-produced products.…”

Section: Micromouldingmentioning

confidence: 99%

Microfabrication using synchrotron radiation

Tolfree¹

1998

Rep. Prog. Phys.

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The realization of precision deep microstructures requires high-energy, intense parallel beams of x-rays from synchrotron radiation sources and novel process technology. Deep x-ray lithography with synchrotron radiation is basically a shadow printing process in which a two-dimensional pattern is accurately transferred from a mask into a resist material by chemical changes induced by the radiation. Subsequent electroforming and moulding processes are used to manufacture microstructures from metals, plastics and ceramics. This process, known as LIGA (LIthographie, Galvanoformung, and Abformung), first developed in Germany, is based on a combination of lithography, electroforming and replication processes. The development of the LIGA process for the fabrication of a wide range of precision microstructures has been stimulated by the increasing use of synchrotron radiation sources for lithography.Applications for microstructures exist in many sectors of industry. These include chemical and process engineering, biomedical instrumentation, automotive and aerospace technology, environmental monitoring and information technology. Emphasis is placed on three main areas, micromechanics, micro-optics and microfluidics, which are emerging with the widest range of industrial applications.This paper reviews the progress being made in microfabrication technology using x-ray beam lithography and the LIGA process. It includes a description of synchrotron radiation, storage ring sources, the fabrication processes, applications and potential markets. Reference is also made to European networks and R&D activity worldwide.

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Section: Micromouldingmentioning

confidence: 99%

Microfabrication using synchrotron radiation

Tolfree¹

1998

Rep. Prog. Phys.

View full text Add to dashboard Cite

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Semiconductor Laser Amplifiers as Multifunctional Devices

Cited by 1 publication

References 8 publications

Microfabrication using synchrotron radiation

Microfabrication using synchrotron radiation

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