2010
DOI: 10.1016/j.mechatronics.2010.07.001
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Sensing of the time-varying angular rate for MEMS Z-axis gyroscopes

Abstract: a b s t r a c tIn this paper, a nonlinear estimation strategy for sensing the time-varying angular rate of a Z-axis MEMS gyroscope is presented. An off-line adaptive least-squares estimation strategy is first developed to accurately estimate the unknown model parameters. Both axes of a Z-axis MEMS gyroscope are then actively controlled utilizing an on-line controller/observer to facilitate time-varying angular rate sensing. The proposed nonlinear estimation strategy is developed based on a Lyapunov-based analy… Show more

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Cited by 12 publications
(4 citation statements)
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“…MEMS gyroscope errors contain system errors and random errors. System errors such as bias and scale are compensated by laboratory turntable calibration [ 12 ] and specific movement state-based system-level calibration. However, random errors have characteristics of uncertainty and randomness [ 13 ], which cannot be fully compensated by analysis methods, yet can be restrained with a filtering method [ 14 , 15 ].…”
Section: Introductionmentioning
confidence: 99%
“…MEMS gyroscope errors contain system errors and random errors. System errors such as bias and scale are compensated by laboratory turntable calibration [ 12 ] and specific movement state-based system-level calibration. However, random errors have characteristics of uncertainty and randomness [ 13 ], which cannot be fully compensated by analysis methods, yet can be restrained with a filtering method [ 14 , 15 ].…”
Section: Introductionmentioning
confidence: 99%
“…In the last few years, some control approaches have been proposed to control the MEMS vibratory rate gyroscope (Leland, 2003;Park and Horowitz, 2003;Oboe et al, 2005;Salah et al, 2010). The MEMS gyroscope have nonlinear dynamics with uncertainties and disturbances and therefore the conventional control approaches based on linearized model do not give satisfactory control performance.…”
Section: Introductionmentioning
confidence: 99%
“…Leland 2 presented controllers to tune the drive axis oscillation to a fixed frequency and amplitude, and these drive the sense axis vibration to zero for force-to-rebalance operation. Salah et al 3 developed a new control strategy to sense the time-varying angular rate for MEMS z-axis gyroscopes. Generally, the adaptive controllers presented earlier are based on the assumption that structure of the system model is known with unknown system parameters.…”
Section: Introductionmentioning
confidence: 99%