Abstract:This paper describes the detection of volatile organic compounds (VOCs) through analyses of two output signals from integrated microcantilever sensor arrays coated with organic‐inorganic hybrid sensing layers. The surface of TiO2 porous films was modified by amphiphilic terthiophene monomers and the adsorbed monomers were polymerized at the surface of TiO2 nanoparticles. The TiO2 porous films covered with polythiophene layers worked as highly sensitive sensing interfaces to provide two output signals for weigh… Show more
“…Our investigations into the dynamic properties of the polymer cantilevers support the feasibility of miniaturization of the PC cantilever (Shiraishi, et al, 2013). Furthermore, titanium oxide, a material with a large distribution factor can be applied as an adsorption layer (Kimura, et al, 2012). Although further studies are needed, the PC-based cantilever sensors will ultimately satisfy the regulatory requirements for VOC monitoring in semiconductor fabrication facilities.…”
“…Our investigations into the dynamic properties of the polymer cantilevers support the feasibility of miniaturization of the PC cantilever (Shiraishi, et al, 2013). Furthermore, titanium oxide, a material with a large distribution factor can be applied as an adsorption layer (Kimura, et al, 2012). Although further studies are needed, the PC-based cantilever sensors will ultimately satisfy the regulatory requirements for VOC monitoring in semiconductor fabrication facilities.…”
“…For instance, carboxylic acid functionalized terthiophene was immobilized on NPs of TiO 2 , and then either electrochemically or chemically oxidized to form a porous TiO 2 /PT film on the microcantilever surface (Fig. 4a) [108]. With this microcantilever, the change of both the resistance and resonant frequency accompanying injection of VOCs into the N 2 carrier gas ( Fig.…”
Section: Scheme 12mentioning
confidence: 99%
“…Similarly, materials with high surface area, such as carbon allotropes and different nanoparticles (NPs), were engaged with PTs for VOCs sensing [107][108][109][110][111]. A simple hybrid chemFET sensor (Fig.…”
Section: Determination Of Organic Volatile Compounds Using Inorganic/mentioning
“…Conductive polymers such as polyaniline, polypyrrle and polythiophene attracted tremendous attention due to a wide variety of applications, including anti-static coating [1][2][3], batteries [4][5][6][7], sensors [8][9][10][11], electrodes [12,13] and so on. Among these conductive polymers, polyaniline (PANi) might be the most promising because of its good environmental stability, ease of synthesis, thermal stability and an inexpensive synthetic route.…”
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.