Sensing Techniques and Interrogation Methods in Optical MEMS Accelerometers: A Review

Malayappan, Balasubramanian; Lakshmi, U. Poorna; Rao, Bo; Ramaswamy, Kannan; Pattnaik, Prasant Kumar

doi:10.1109/jsen.2022.3149662

Cited by 32 publications

(12 citation statements)

References 136 publications

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“…Starting from MEMS-based accelerometers, gyros and IMUs, relevant scientific contributions are reported in [46]- [49]. When dealing with gas and environmental miniaturized sensors, the literature is also populated by remarkable works, like those in [50]- [54].…”

Section: Current Gaps In Linking Research On 6g and Micro/nano Hardwa...mentioning

confidence: 99%

Review and Perspectives of Micro/Nano Technologies as Key-Enablers of 6G

Iannacci

Poor

2022

IEEE Access

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Section: Current Gaps In Linking Research On 6g and Micro/nano Hardwa...mentioning

confidence: 99%

Review and Perspectives of Micro/Nano Technologies as Key-Enablers of 6G

Iannacci

Poor

2022

IEEE Access

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“…In micro-opto-electro-mechanical system (MOEMS) sensors, the proof mass displacement changes the characteristics of the output light. They use several approaches, such as intensity-based detection, [ 3 , 16 , 19 ] fiber Bragg grating (FBG) [ 20 , 21 ], and Fabry–Pérot interferometry (FPI) [ 17 , 22 , 23 , 24 , 25 , 26 , 27 ]. An intensity-based optical displacement sensor measures the intensity change of the light and converts it into displacement information.…”

Section: Introductionmentioning

confidence: 99%

“…Thus, it changes the period of the FBG. This change can be converted into the wavelength variation of light [ 21 ]. However, the FBG requires the integration of an optical spectrum analyzer to monitor the change in the wavelength and a more complex fabrication process for the waveguide in the MEMS device.…”

Section: Introductionmentioning

confidence: 99%

Design and Development of a MOEMS Accelerometer Using SOI Technology

et al. 2023

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The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterization of a silicon-on-insulator (SOI) MEMS device, which is embedded in a metallic package and connected to an optical fiber. This integrated micro-opto-electro-mechanical system (MOEMS) sensor contains a mass structure and handle layers coupled with four designed springs built on the device layer. An optical reading system using an FPI is used for displacement interrogation with a demodulation technique implemented in LabVIEW®. The results indicate that our designed MOEMS sensor exhibits a main resonant frequency of 1274 Hz with damping ratio of 0.0173 under running conditions up to 7 g, in agreement with the analytical model. Our experimental findings show that our designed and fabricated MOEMS sensor has the potential for engineering application to monitor vibrations under high-electromagnetic environmental conditions.

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“…In the mechanical domain, they are used in multiple mechanical devices, such as actuators and valves. In the optical domain, they are used in multiple optical applications, such as sensors and microphones [4][5][6][7][8] . From such diversified spectrum of applications, it has been evident that MEMS are useful candidates in medical, chemical, and biological fields [9][10][11] .…”

Section: Introductionmentioning

confidence: 99%

A Review on Microchannel Fabrication Methods and Applications in Large-Scale and Prospective Industries

Afzal¹,

Tayyaba²,

Ashraf³

et al. 2022

Evergreen

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Microchannels based on microelectromechanical systems (MEMS) have received a lot of interest in the microfluidics and biomedical fields over the past forty years. While their applications have been multifarious, a comprehensive literature review focusing on their design, type, and applications is not currently present in the literature. Researchers working on these elements of microchannels will gain targeted knowledge from the current review on microchannels. Due to its advanced properties, flexibility of mass, and small size, microdevice demand has been rising quickly, particularly in industrial applications. The classification of microchannels and their uses are the main focus of this work. These include but are not limited to molding, electroplating, lithography, lab-ona-chip, micromolding, micromachining, micromilling, laser ablation, lithography, microcontact printing (µcp), hot embossing, electrochemical micromachining (EMM), and etching. In addition, numerous hybrid techniques for microchannel manufacturing have been reported. So, in essence, this review offers a range of advancements in microchannel manufacturing. The review also attempts to present a qualitative analysis describing the various methodologies associated with microchannels in terms of their design, shape, and flow regimes for applications such as pressure drop and transfer of heat prediction. Additionally, depending on the precise uses needed, a number of materials, including but not limited to ceramics, silicon, metals, and polymers, are utilized in the manufacture of microchannels. On metallic substrates, polymers such as silicon, glass, and polymeric materials are used. The biomedical industry uses polymeric and glass substrates instead of silicon substrates, which are used for mechanical engineering and electronic applications. In addition to outlining methods for choosing the best kind of microchannel, this paper also suggests important directions for the future.

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Sensing Techniques and Interrogation Methods in Optical MEMS Accelerometers: A Review

Cited by 32 publications

References 136 publications

Review and Perspectives of Micro/Nano Technologies as Key-Enablers of 6G

Review and Perspectives of Micro/Nano Technologies as Key-Enablers of 6G

Design and Development of a MOEMS Accelerometer Using SOI Technology

A Review on Microchannel Fabrication Methods and Applications in Large-Scale and Prospective Industries

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